Acoustic wave sensor apparatus, method and system using wide bandgap materials

Abstract

An acoustic wave sensor to detect an analyte, the sensor comprising a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.

Description

FIELD OF THE INVENTION [0001] The present invention concerns the use of acoustic wave (AW) sensors to detect chemical and biological analytes. BACKGROUND INFORMATION [0002] Acoustic wave sensors use a detection arrangement that is based on perturbations to mechanical or acoustic waves. As an acoustic wave propagates through or on the surface of the acoustive wave sensor material, any changes to the physical or chemical characteristics of the wave path may affect the velocity and / or amplitude of the acoustic wave. These changes may be correlated to the corresponding physical, chemical, or biological quantities being measured to provide sensing. [0003] Recreational inland lakes, public beaches, and parks, which may be designated for recreational purposes including fishing, swimming, etc., may be closed if there are sufficiently high levels of bacterial contamination, or other sufficiently high levels of chemical, heavy metal, and biological contaminants. At present, continuous monitor...

AI Technical Summary

Benefits of technology

"The present invention relates to the use of wide bandgap semiconductor materials, such as aluminum nitride (AlN), in acoustic wave devices for chemical and biological sensors. Compared to other materials, AlN has advantages such as fast acoustic velocity, high electromechanical coupling coefficient, and compatibility with silicon. The use of AlN-based AW sensors as biosensors can provide faster detection, higher sensitivity, and can be used in air and water environments. The invention also includes new processing approaches, immobilization structures, and integration of biosensors with other electronics on a chip. The invention can provide a new class of economical and portable biosensor arrangements that can detect desired analytes more sensitively and rapidly."

Problems solved by technology

Using an AlN-based acoustic wave arrangement as a common sensor platform for integration with the sensing medium, immobilization layer polymer viscoelectric properties or metal mechanical properties of the wave arrangement may result in significant changes in such acoustic wave characteristics when the arrangement contacts liquid.

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