Silane monomers and siloxane polymers for semiconductor optoelectronics

a technology of semiconductor optoelectronics and monomers, which is applied in the direction of plastic/resin/waxes insulators, organic insulators, coatings, etc., can solve the problems of low thermal stability, the organic polymer cannot be chemically mechanically polished or etched back by dry processing without damaging the film, etc., to achieve excellent chemical resistance, low chemical adsorption behavior, and high cross-linking
US20060293478A1Inactive Publication Date: 2006-12-28SILECS OY
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
SILECS OY
Publication Date
2006-12-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method for producing a polymer for semiconductor optoelectronics, comprising the steps of providing a monomer is produced having the formula: wherein: R1 is a hydrolysable group R2 is hydrogen, and R3 is a bridging linear or branched bivalent hydrocarbyl group, said monomer being produced by hydrosilylation of the corresponding starting materials, and homo- or copolymerizing the monomer to produce a polymer.
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Description

[0001] This application claims priority of U.S. Provisional Application for Patent Ser. No. 60 / 689,541 filed Jun. 13, 2005, which is incorporated herein by reference.BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to a method making novel organo fuictionalized silane precursors and polymers of the same that are applicable for thin films used for example as dielectrics in integrated circuits, optoelectronic applications and for other similar applications. In particular, the invention concerns first making an intermediate monomer and then converting the monomer to an organo functionalized silane monomer and finally forming a polymer or polymer compositions of the functionalized monomers. The invention also concerns a method for producing such films by preparing siloxane compositions by polymerization of the organo functionalized monomers, by applying the polymerized compositions on a substrate in the form of a layer and by curing the l...

Claims

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