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Semiconductor device including misfet

a semiconductor field effect transistor and semiconductor technology, applied in the field of semiconductor devices, can solve problems such as increased junction leakage current or contact failure, uneven contact resistance, and increased junction leakage curren

Inactive Publication Date: 2007-08-16
KK TOSHIBA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this conventional technology, however, when forming the silicide film on the source / drain layer, since the silicon germanium and the silicide film have poor affinity, an increase in a junction leakage current or a contact failure may possibly occur.
However, since this compound is thermally unstable, aggregation of Ni or deterioration in surface morphology occurs, a junction leakage current is increased, and unevenness of a contact resistance becomes considerable on, e.g., an interface of the compound and the nickel silicide film.
As a result, a problem of deterioration in transistor characteristics may occur.

Method used

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  • Semiconductor device including misfet
  • Semiconductor device including misfet
  • Semiconductor device including misfet

Examples

Experimental program
Comparison scheme
Effect test

embodiment 1

[0020] First, referring to FIG. 1, a structure of a semiconductor device according to Embodiment 1 of the present invention will be explained. FIG. 1 is a cross-sectional view showing a semiconductor device according to this embodiment that functions as a pMOS of a CMOSFET.

[0021] As shown in FIG. 1, an element isolating region 101 is provided in a semiconductor substrate, e.g., a single-crystal silicon semiconductor substrate (which will be referred to as a silicon substrate hereinafter) 100, and an element forming region 100a is partitioned by this element isolating region 101. A gate electrode 104 is formed on the silicon substrate 100 via a gate insulating film 103. A first sidewall insulating film 105 is formed on a side surface of the gate electrode 104, and a second sidewall insulating film 106 is formed on a side surface of the first sidewall insulating film 105.

[0022] Further, a first source / drain layer 108 as an extension layer in which a p-type impurity ion is implanted ...

embodiment 2

[0046] A structure of a semiconductor device according to Embodiment 2 of the present invention will be first explained with reference to FIG. 10. FIG. 10 is a cross-sectional view showing a semiconductor device according to this embodiment that functions as a pMOS of a CMOSFET.

[0047] As shown in FIG. 10, an element isolating region 101 is provided in a single-crystal silicon semiconductor substrate (a silicon substrate) 100, and an n-type well region 102 having an n-type impurity ion is formed in an element forming region 100 partitioned by this element isolating region 101. A gate insulating film 103 is formed on the n-type well region 102 of the silicon substrate 100, and a gate electrode 104 is formed on the gate insulating film 103. A first sidewall insulating film 105 is formed on a side surface of the gate electrode 104, and a second sidewall insulating film 106 is formed on a side surface of the first sidewall insulating film 105.

[0048] Additionally, a semiconductor layer ...

modification 1

of Embodiment 2

[0072]FIG. 14 is a cross-sectional view of a semiconductor device according to Modification of Embodiment 2.

[0073] The semiconductor device according to this modification is different from the semiconductor device according to Embodiment 2 in that a thickness of a first source / drain layer 108 as an extension layer is substantially the same as a thickness of a semiconductor layer 107 below a second sidewall insulating film 106. Therefore, in the following description of the semiconductor device according to this modification, like reference numerals denote parts equal to those in the structure and the manufacturing method of the semiconductor device according to Embodiment 2, thereby omitting a detailed explanation thereof.

[0074] That is, a first source / drain layer 108 in a semiconductor device according to this modification is formed by doping, e.g., boron (B) simultaneously with selective epitaxial grow of a silicon germanium layer as a semiconductor layer 107. The...

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Abstract

A semiconductor device includes a semiconductor substrate, a gate insulating film, a gate electrode, a source / drain layer, and a germanide layer. The gate insulating film is formed on the semiconductor substrate. The gate electrode is formed on the gate insulating film. The source / drain layer is formed on both sides of the gate electrode, contains silicon germanium, and has a germanium layer in a surface layer portion. The germanide layer is formed on the germanium layer of the source / drain layer.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application is based upon and claims the benefit of priority from prior Japanese Patent Application No. 2006-034916, filed Feb. 13, 2006, the entire contents of which are incorporated herein by reference. BACKGROUND OF THE INVENTION 1. Field of the Invention [0002] The present invention relates to a semiconductor device, and more particularly to an MISFET (Metal Insulator Semiconductor Field Effect Transistor) [0003] 2. Description of the Related Art [0004] In recent years, with miniaturization of semiconductor devices, an increase in speed of an MISFET has attracted attention. For example, in a CMOSFET (Complementally MOS Field Effect Transistor), a carrier (hole) mobility in a channel region of a p-channel MOSFET (which will be referred to as a pMOS hereinafter) is slower than a carrier (electron) mobility in a channel region of an n-channel MOSFET (which will be referred to as an nMOS hereinafter), and hence increasing a speed o...

Claims

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Application Information

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IPC IPC(8): H01L29/94
CPCH01L21/28518H01L29/165H01L29/665H01L29/7848H01L29/6656H01L29/66636H01L29/66545
Inventor YASUTAKE, NOBUAKI
Owner KK TOSHIBA
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