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Method of manufacturing composite structure, impurity removal processing apparatus, film forming apparatus, composite structure and raw material powder

a technology of impurity removal and processing equipment, applied in the field of manufacturing composite structures, can solve the problem of being unable to use formed films as piezoelectric materials, and achieve the effect of suppressing the separation of films or the generation of hillocks and high yield

Inactive Publication Date: 2009-06-04
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0018]According to the present invention, a film is formed according to the AD method by using raw material powder containing an amount of impurity, which generates a gas by being heated, less than a predetermined value, and therefore, an amount of the gas generating from inside of the film when heated can be reduced. Accordingly, separation of the film or generation of hillocks can be suppressed at the time of heat treatment of the film. Therefore, dense and high-quality films can be manufactured with high yield.

Problems solved by technology

By the way, when a piezoelectric material such as PZT (lead zirconium titanate) is fabricated by using the AD method, it is necessary to heat-treat (post-anneal) the piezoelectric material after film formation because the piezoelectric material does not exhibit a sufficient electric property as it is.
Although the post-anneal is essential for improving the electric property of the piezoelectric material, when such a phenomenon occurs, it becomes impossible to use the formed film as the piezoelectric material.

Method used

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  • Method of manufacturing composite structure, impurity removal processing apparatus, film forming apparatus, composite structure and raw material powder
  • Method of manufacturing composite structure, impurity removal processing apparatus, film forming apparatus, composite structure and raw material powder
  • Method of manufacturing composite structure, impurity removal processing apparatus, film forming apparatus, composite structure and raw material powder

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first embodiment

[0040]FIG. 1 is a schematic view showing a film forming apparatus using a method of manufacturing a composite structure according to the present invention. The film forming apparatus has an aerosol generating unit and a film forming unit. As shown in FIG. 1, the aerosol generating unit includes an aerosol generation chamber 1, a vibration table 2, a raising gas nozzle 3 and a pressure regulating gas nozzle 4. The film forming unit includes a film formation chamber 7, an exhaust pipe 8, an injection nozzle 9 and a substrate stage 10. Further, the film forming apparatus has an aerosol carrier pipe 5 and a decarburizing processing unit 6 provided between the aerosol generating unit and the film forming unit. The aerosol carrier pipe 5 and the decarburizing processing unit 6 construct, together with the aerosol generating unit, the impurity removal processing apparatus.

[0041]In the aerosol generation chamber 1, an aerosol is generated. Further, the aerosol generation chamber 1 is mounte...

second embodiment

[0111]Next, a method of manufacturing a composite structure according to the present invention will be explained.

[0112]Here, in the above explained first embodiment of the present invention, decarburizing processing of the raw material powder is performed in the middle of transportation of the aerosol generated in the aerosol generation chamber 1 as shown in FIG. 1 to the film formation chamber 7. However, the processing of generating an aerosol may be performed on the raw material powder that has been decarburizing processed in advance. In this case, at the time of film formation, a typical AD film forming apparatus (e.g., an apparatus formed by omitting the decarburizing processing unit 6 in the film forming apparatus as shown in FIG. 1) is used.

[0113]As a method of performing decarburizing processing on the raw material powder, as explained in the first embodiment, the method of heating the raw material powder by using a heater, the method of heating the raw material powder by ap...

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Abstract

A film forming apparatus for forming a film according to an AD method in which separation of the film or generation of hillocks is suppressed when the film formed on a substrate is heat-treated. The apparatus includes: an aerosol generating unit (1-4) for dispersing raw material powder (20) with a gas, thereby aerosolizing the raw material powder (20); a processing unit (6) for processing the raw material powder (20) aerosolized by the aerosol generating unit (1-4) to reduce an amount of impurity, which generates a gas by being heated, adhering to or contained in the raw material powder (20); and an injection nozzle (9) for spraying the aerosolized raw material powder (20) processed by the processing unit (6) toward a substrate (30) to deposit the raw material powder (20) on the substrate (30).

Description

TECHNICAL FIELD[0001]The present invention relates to a method of manufacturing a composite structure by using an aerosol deposition method of depositing raw material powder on a substrate by injecting the raw material powder toward the substrate, and an impurity removal processing apparatus and a film forming apparatus to be used in the method of manufacturing a composite structure. Further, the present invention relates to a composite structure manufactured by using the method of manufacturing a composite structure, and raw material powder to be used in the method of manufacturing a composite structure.BACKGROUND ART[0002]Recent years, in the field of micro electrical mechanical system (MEMS), the manufacture of devices containing functional materials such as electronic ceramics, which express predetermined functions by being applied with voltages, like dielectric materials, piezoelectric materials, magnetic materials, pyroelectric materials, and semiconductor materials by using f...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B32B19/00
CPCC23C4/12C23C24/04C23C4/127C23C4/134C23C4/137B05D1/16B05D3/002
Inventor MIYOSHI, TETSU
Owner FUJIFILM CORP
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