Method for manufacturing a semiconductor device

Abstract

The present application discloses a method for manufacturing a semiconductor device, comprising: forming a local buried isolation dielectric layer in a semiconductor substrate; forming a fin in the semiconductor substrate and on top of the local buried isolation dielectric layer; forming a gate stack structure on a top surface and side surfaces of the fin; forming source / drain structures in portions of the fin which are on opposite sides of the gate stack structure; and performing metallization. A conventional quasi-planar top-down process is utilized in the present invention to achieve a good compatibility with the CMOS planar processes, easy integration, and suppression of short channel effects, which promotes the development of MOSFETs having reduced sizes.

Description

FIELD OF THE INVENTION[0001]The present invention relates to semiconductor technology, and in particular, to a method for manufacturing a bulk silicon fin field effect transistor (FinFET).BACKGROUND OF THE INVENTION[0002]With the integrated circuit industry are kept developing according to the Moore Law, feature sizes of CMOS devices are kept shrinking. Planar bulk silicon CMOS structure devices have encountered serious challenges. To solve these issues, various novel device structures have been developed. Among a number of novel device structures, a fin field effect transistor (FinFET) is one of the most promising novel device structures that will take the place of planar bulk silicon CMOS devices. The FinFET has become an international research focus.[0003]In early days, a FinFET structure device is manufactured on an SOI substrate, and the process for manufacturing such a device is relatively simple as compared with that for manufacturing such a device on a bulk silicon substrate...

AI Technical Summary

Benefits of technology

[0005]One object of the present invention is to provide a novel method for manufacturing a bulk silicon fin field effect transistor (FinFET). The method is easily incorporated with and highly compatible with the planar CMOS processes.

[0015]According to the above-mentioned technical solutions, the present invention has the following beneficial effects.

[0016]Firstly, the method for manufacturing a semiconductor device according to the present invention can provide a fin field effect transistor on a bulk silicon substrate. The method overcomes self-heating effects and floating body effects in connection with an SOI FinFET device, and it thus reduces the manufacturing cost.

[0018]Thirdly, the method for manufacturing a semiconductor device according to the present invention can be easily implemented with a simple manufacture process, and is easy to be incorporated with and highly compatible with the planar CMOS processes.

Problems solved by technology

Planar bulk silicon CMOS structure devices have encountered serious challenges.

However, there are several drawbacks for an SOI FinFET, such as high manufacturing cost, poor heat dissipation, floating body effects, poor compatibility with the CMOS processes, etc.

However, the conventional Bulk Silicon FinFET devices have several drawbacks as compared with the SOI FinFET devices, for example: short channel effects (SCEs) cannot be suppressed as required; a leakage path may still be formed with the portion of a fin at the bottom of a channel, which results in a large leakage; and the impurity profile cannot be well controlled.

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