Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

Abstract

A liquid ejecting head includes a piezoelectric element including a first electrode, a piezoelectric layer overlying the first electrode with an orientation control layer therebetween, and a second electrode overlying the piezoelectric layer. The piezoelectric layer is made of a complex oxide having a perovskite structure including an A site containing lead and a B site containing zirconium and titanium. The orientation control layer is made of a complex oxide having a perovskite structure including an A site containing lanthanum and a B site containing nickel and titanium.

Description

BACKGROUND[0001]1. Technical Field[0002]The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that each include a piezoelectric element including a piezoelectric layer made of a piezoelectric material and electrodes, and that eject droplets from nozzle apertures, and relates to the piezoelectric element.[0003]2. Related Art[0004]Ink jet recording heads are a typical type of liquid ejecting head. For example, an ink jet recording head includes a vibration plate defining a part of a pressure generating chamber communicating with nozzles through which ink droplets are discharged. In the ink jet recording head, a piezoelectric element deforms the vibration plate to apply a pressure to the ink in the pressure generating chamber, thereby discharging ink droplets through the nozzles. Some of the piezoelectric elements used in ink jet recording heads have a structure in which a piezoelectric layer made of a piezoelectric material capable of electromechanica...

AI Technical Summary

Benefits of technology

This patent describes a new liquid ejecting head and apparatus that use a piezoelectric element with improved crystallinity near the lower electrode. This results in better piezoelectric properties and durability.

Problems solved by technology

However, if such an orientation control layer is used, the titanium in the orientation control layer is diffused upward or oxidized, consequently increasing the area of electrical conduction failure in the lower electrode is disadvantageously increased.

Also, thermal reaction or the like between the titanium in the orientation control layer and the lead zirconate titanate of the piezoelectric layer reduces the crystallinity of the piezoelectric layer at the vicinity of the lower electrode, thereby degrading piezoelectric properties.

This issue can arise not only in an actuator installed in a liquid ejecting head such as an ink jet recording head, but also in actuators in other apparatuses.

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