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Method for preparing monosilane using trialkoxysilane

a monosilane and trialkoxysilane technology, applied in the field of monosilane preparation, can solve the problems of difficult to widely use the method of monosilane preparation, need to remove a starting reagent, increase in the price of a final product, etc., and achieve the effect of improving the preparation process, improving the performance and facilitating the removal of starting reagents

Active Publication Date: 2016-03-08
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0013]When monosilane is prepared according to the above-described technical solution according to the present invention, performance is excellent, and feasibility is sufficient under laboratory conditions as well as at industrial scale. In addition, there is an effect that the preparation process may be simplified and improved while ensuring continuity, operability, productivity, and stability of the preparation process.
[0014]Furthermore, as specific effects, there are improved effects as follows.
[0015]It is possible to decrease the initial induction period of the synthesis of alkoxysilane by approximately 15 times.
[0016]Process selectivity for triethoxysilane, which is a main product, is ensured at the 96% level.
[0017]A synthesis reaction of triethoxysilane and monosilane may be performed in a continuous process which maintains a high and stable synthesis rate.
[0018]The productivity of the preparation process is increased by decreasing the contact time of a reagent by 5 times or more.

Problems solved by technology

However, when a corrosive chlorine compound is present, the invention makes it difficult to purify monosilane into high-purity monosilane due to transfer of impurities from the wall of equipment toward monosilane and causes an increase in the price of a final product, and thus it is difficult to widely use the method to prepare monosilane.
A major disadvantage of the method is that it is necessary to remove a starting reagent from silane, particularly, hydrogen chloride residue.
In relation to this, there is a problem in that it is required to additionally perform a difficult process of removing HCl from a final product.
As a major disadvantage of the method, there is a problem in that it is necessary to additionally perform a difficult process of removing a starting reagent, that is, hydrogen chloride or the corresponding acetic acid or sulfuric acid residue from silane.
Examples of other limitations include high exothermicity, and when a violation occurs in the replenishment mode of a starting reagent in a reactor, the reactor is likely to explode.

Method used

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  • Method for preparing monosilane using trialkoxysilane
  • Method for preparing monosilane using trialkoxysilane

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0106]Silicon metal was pulverized in air using a planetary mill until the particle size thereof became 30 μm to 100 μm. 3.3 kg of pulverized silicon, 6.6 kg of a solvent, THERMINOL® 66, and 0.2 kg of the catalyst CuCl were put into a reactor. The contact material was heated to 242+2° C. while a stirrer is continuously operated at a rate of 850 rpm, and dried alcohol (ethanol) began to be supplied to the reactor at a maximum rate of 600 mL / h using a metering pump (digital dosing pump) GRUNDFOS® DME 60-10 AR. From the instant when a liquid product was produced from the reactor, the sample was collected every 30 minutes. When observing a sample analysis using gas chromatography Agilent® GC7890A, the synthesis reaction of triethoxysilane taking place as a result of reaction of silicon metal with ethyl alcohol began to take place 150 minutes (initial induction period) after alcohol was supplied thereto, and the intensity of the reaction was gradually increased (see the curve of Example ...

example 2

[0107]An experiment was conducted in the same manner as in Example 1, but the preparation environment of the reaction reagent was completely different. According to the proposed method, 3.3 kg of silicon metal was continuously pulverized in 6.6 kg of solvent, THERMINOL® 66. In the pulverization process, 0.2 kg of copper (I) chloride was introduced into a liquid suspension. Alcohol was supplied to the reactor, and then the synthesis reaction began after the initial reaction induction period of 10 minutes, the reaction rate increasing thereafter for 60 minutes (see the curve of Example 2 in FIG. 1). After 180 minutes, the synthesis reaction rate of triethoxysilane began to decrease, and the reaction was completely terminated 260 minutes after supplying alcohol. 1635 g of triethoxysilane and 105 g of tetraethoxysilane were obtained. The selectivity of triethoxysilane reached 94%.

example 3

[0108]An experiment was conducted in the same manner as in Example 2, but there is a significant difference in that a continuous process was performed by continuously supplying a liquid suspension of silicon and solvent according to the proposed method to a reactor, and the ratio of mass consumed during the reaction with ethyl alcohol was 1:2. That is, during the synthesis process of alkoxysilane, a liquid suspension of silicon was supplied thereto at a rate suitable for the consumption rate of silicon according to the reaction. The amount of silicon consumed per unit time was calculated according to the mass balance equation of the following Equation 1.

mSi=k1·mTES+k2·mTEOS  [Equation 1]

[0109]wherein mSi is a mass of silicon consumed as a result of direct reaction for unit time, mTES is a mass of triethoxysilane prepared as a result of direct reaction for unit time, mTEOS is a mass of tetraethoxysilane prepared as a result of direct reaction for unit time, coefficient k1 is a molecu...

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Abstract

Provided is a method for preparing monosilane, more particularly a method for economically preparing monosilane, which is useful for the composition of a thin semiconductor structure and multipurpose high-purity polycrystalline silicon, by preparing monosilane with high purity and high yield using trialkoxysilane.

Description

CROSS REFERENCE TO RELATED APPLICATION[0001]This application claims the priority of Uzbekistan Patent Application No. IAP 20120401 filed on Oct. 2, 2012 in the Uzbekistan Patent and Trademark Office, Korean Patent Application No. 10-2012-0150993 filed on Dec. 21, 2012 in the Korean Patent and Trademark Office and a PCT International Application No. PCT / KR2013 / 003743 filed on Apr. 30, 2013. Further, this application is the National Phase application of International Application No. PCT / KR2013 / 008840 filed on Oct. 2, 2013, which is incorporated herein by reference in its entirety.TECHNICAL FIELD[0002]The present invention relates to a method for preparing monosilane, and more particularly, to a method for economically preparing monosilane, which is useful for forming a thin film of a semiconductor and for multipurpose high-purity polycrystalline silicon, by preparing monosilane with high purity and high yield using trialkoxysilane.BACKGROUND ART[0003]Monosilane is present in a gas sta...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): C01B33/04B01J23/72
CPCC01B33/043B01J23/72C01B33/04
Inventor KIM, TAEK JOONGKIM, YONG ILKIM, KYUNG YEOLKIM, DEOK YUNKHATAM, ASHUROVSHAVKAT, SALIKHOVVLADIMIR, ROTSHTEYNKHEKAYAT, ASHUROVAAZIZ, KURBANOVILYOS, ABDISAIDOVSULTAN, AZIZOVRUSTAM, ASHUROV
Owner OCI
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