The present application relates to the technical field of
information processing, and more particularly to an intelligent beam current adjustment method and device based on IMP, equipment and storage medium, the operation interface image of each IMP
machine is obtained in real time through the
KVM switch, the current beam current parameter and real-time state identifier in the operation interface image are recognized and extracted by using the OCR visual
algorithm, the process requirement data of the current
wafer batch number is obtained, the parameter and state data and the process requirement data are integrated, the integrated data is cleaned and normalized to obtain a preprocessed
data set, the AI
decision model is used to analyze the difference information between the current
machine beam current state and the target process requirement based on the preprocessed
data set, and the optimal beam current adjustment parameter is calculated according to the difference information, so as to improve the adjustment accuracy, adapt to complex
process requirements, generate a control instruction according to the optimal beam current adjustment parameter, and IMP
machine adjusts the related hardware module parameters according to the control instruction, thereby improving the intelligent level.