Preparation of diamond coat for integral rotary cutting tool made from hard metal alloy
A diamond coating and cemented carbide technology, which is applied in metal material coating technology, coating, metal processing equipment and other directions, can solve the problem that the thickness uniformity and quality uniformity of diamond coating cannot be guaranteed, and achieve industrialization prospects. Bright, significant economic benefits, the effect of convenient deposition conditions
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[0009] The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.
[0010] like figure 1 As shown, the device of the present invention mainly includes: a hot wire power supply 1, a gear motor 2, a sealing rotary device 3, a sealing gasket 4, a quartz tube 5, a substrate supporting platform 6, a DC bias source 7, a base sealing gasket 8, a base 9, Water inlet pipe 10, air extraction pipe 11, water outlet pipe 12, reaction chamber 13, thermistor 14, heating wire 15, copper air guide pipe 16, mass flow meters 17-19, gas cylinders 20-22. The sealed rotary device 3, the quartz tube 5 and the base 9 form a reaction chamber 13, wherein the quartz tube 5 is placed on the base 9, and the base sealing gasket 8 is placed in the middle, and the sealed rotary device 3 is placed on the quartz tube 5, The middle pad has sealing gasket 4. The geared motor 2 is fixed on the upper surface of the sealed rotary device 3 by...
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