Cantilever type high rate turbine vacuum pump and its evacuation method
A cantilever and vacuum pump technology, applied in non-variable-capacity pumps, non-displacement pumps, pumps, etc., can solve the problems of difficult to achieve high rotation speed and large volume, and achieve high mechanical efficiency, reduced energy consumption, and efficient extraction. Effect
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Embodiment 1
[0029] The cantilever type high-speed turbo vacuum pump of this embodiment has a detailed structure as shown in the accompanying drawings. It includes a gear speed-up box 9, two independent pump heads and a high-speed rotor. The gear speed-up box 9 adopts a single-stage speed-up, and the gear 12 The upper shaft is connected with the prime mover; the two independent pump heads are separated on both sides of the gear speed increaser box 9, and have a symmetrical structure. The independent pump head is a split structure, including the suction port 1, the inner body of the volute 5, and the stationary wheel cover of the impeller. 6. The volute 4 and the air seal 7, the suction port 1 and the impeller static wheel cover 6 are installed on the volute inner body 5 to form an integral body embedded in the volute 4, and the volute inner body 5 and the volute 4 cavity are combined to form an expansion The air seal 7 is installed on the side of the volute 4 through the flange; the high-sp...
Embodiment 2
[0037] The cantilever type high-speed turbo vacuum pump of this embodiment has a detailed structure as shown in the accompanying drawings. It includes a gear speed-up box 9, four independent pump heads and two high-speed rotors. The gear speed-up box 9 adopts a single-stage speed-up, The shaft on the gear 12 is connected to the prime mover; the four independent pump heads are separated on both sides of the gear speed increaser box 9, and the two on each side have a symmetrical structure. 5. The impeller stationary wheel cover 6, volute 4 and air seal 7, the suction port 1 and the impeller stationary wheel cover 6 are installed on the volute inner body 5 to form an integral body embedded in the volute 4, and the volute inner body 5 and the volute The combination of the 4 cavities forms the diffuser and the medium outflow channel, and the air seal 7 is installed on the side of the volute 4 through the flange; the high-speed rotor includes the gear shaft 10, the thrust plate 11, t...
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