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Jet printing valve based on carbon nano-tube tiny bubble generator and method of producing the same

A micro-bubble generator and carbon nanotube technology, applied in printing and other directions, can solve problems such as high power consumption, achieve the effects of low power consumption, small size, and overcome high power consumption

Inactive Publication Date: 2009-07-22
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The micro-bubble generator is the core of the thermal printing system. At present, most of the micro-heaters based on traditional metal materials are used, and the power consumption is relatively large.

Method used

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  • Jet printing valve based on carbon nano-tube tiny bubble generator and method of producing the same
  • Jet printing valve based on carbon nano-tube tiny bubble generator and method of producing the same
  • Jet printing valve based on carbon nano-tube tiny bubble generator and method of producing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] (1) Surface treatment and cleaning of the glass substrate 1 according to a standard CMOS process;

[0047] (2) The carbon nanotube microbubble generator is prepared on the glass substrate 1, and the process is as follows:

[0048] (2.1) Evaporating titanium with an electron beam to form a titanium film with a thickness of 20nm;

[0049] (2.2) Evaporating gold by electron beam to form a gold film with a thickness of 400nm;

[0050] (2.3) Form gold electrodes 31, 32 using the existing lift-off process (lift-off), and the distance between the gold electrodes 31, 32 is 5 μm;

[0051] (2.4) Mix carbon nanotubes 4 with a diameter of 10 to 30 nm and absolute ethanol solvent in a ratio of 0.01 mg / ml, and disperse the carbon nanotubes uniformly through ultrasound;

[0052] (2.5) 1MHz, 8V AC voltage is loaded between the gold electrodes 31 and 32 on the glass substrate 1, and the carbon nanotube suspension is dropped between the electrodes with a micro-syringe. When the solvent e...

Embodiment 2

[0064] (1) Surface treatment and cleaning of the glass substrate 1 according to a standard CMOS process;

[0065] (2) The carbon nanotube microbubble generator is prepared on the glass substrate 1, and the process is as follows:

[0066] (2.1) Adopt sputtering titanium to form a titanium film with a thickness of 30nm;

[0067] (2.2) Adopt sputtering gold to form a gold film with a thickness of 300nm;

[0068] (2.3) Form gold electrodes 31, 32 using the existing lift-off process (lift-off), and the distance between the gold electrodes 31, 32 is 1 μm;

[0069] (2.4) Mix carbon nanotubes 4 with a diameter of 10 to 30 nm and absolute ethanol solvent in a ratio of 0.005 mg / ml, and disperse the carbon nanotubes uniformly by ultrasonication;

[0070] (2.5) 0.5MHz, 5V AC voltage is loaded between the gold electrodes 31 and 32 on the glass substrate 1, and the carbon nanotube suspension is dropped between the electrodes with a micro-injector. When the solvent evaporates completely, t...

Embodiment 3

[0082] (1) surface-treating and cleaning the silicon substrate 1 with the oxide layer grown therein according to the standard CMOS process;

[0083] (2) The carbon nanotube microbubble generator is prepared on the glass substrate 1, and the process is as follows:

[0084] (2.1) Adopt sputtering titanium to form a titanium film with a thickness of 30nm;

[0085] (2.2) Adopt sputtering gold to form a gold film with a thickness of 300nm;

[0086] (2.3) Form gold electrodes 31, 32 using the existing lift-off process (lift-off), and the distance between the gold electrodes 31, 32 is 10 μm;

[0087] (2.4) Mix carbon nanotubes 4 with a diameter of 10 to 30 nm and absolute ethanol solvent in a ratio of 0.05 mg / ml, and disperse the carbon nanotubes uniformly through ultrasound;

[0088] (2.5) 0.8MHz, 10V AC voltage is loaded between the gold electrodes 31 and 32 on the glass substrate 1, and the carbon nanotube suspension is dropped between the electrodes with a micro-injector. When ...

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Abstract

The invention discloses a jet printing valve based on a carbon nanotube microbubble generator and a preparation method thereof. The jet printing valve is formed by bonding a glass substrate or a silicon substrate with a carbon nanotube microbubble generator and a microprocessed silicon substrate. Carbon nanotubes, two gold electrodes and a silicon dioxide layer constitute a carbon nanotube microbubble generator; the carbon nanotubes are erected between the gold electrodes; the contact parts between the carbon nanotubes and the gold electrodes are covered with a silicon dioxide layer; on the silicon substrate There is a through hole as the liquid inlet pipe, and a groove connected to the liquid inlet pipe is opened on the surface of the silicon substrate; the substrate is bonded to the silicon substrate, so that the position of the carbon nanotube microbubble generator is opposite to the groove, forming a nozzle . The preparation method is to manufacture a carbon nanotube micro-bubble generator on a substrate, manufacture a liquid inlet pipe and a groove on a silicon substrate, and then bond the two. The invention overcomes the disadvantage of high power consumption of the traditional micro-bubble generator, has good potential for high-density integration, and has wide application prospects in the field of advanced manufacturing.

Description

technical field [0001] The invention relates to the application technology of jet printing technology in micro-nano manufacturing, in particular to a jet printing valve based on a carbon nanotube micro-bubble generator and a preparation method thereof. technical background [0002] The application of jet printing technology in the preparation of devices, especially some large-area devices such as displays and adaptive distributed antennas, has attracted more and more attention. Compared with the planar process lithography technology, the advantages of jet printing technology are: no special requirements for the substrate, and suitable for flexible materials; due to the designability of the structure of the nozzle and its movement, the graphics can be formed directly according to the design, and the graphics of jet printing are flexible. , less raw material consumption, low total cost. In addition, jet printing can provide non-contact micro-dispensing of various liquids, suc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/14B41J2/16B41J2/05
Inventor 周文利高俊雄王耘波朱文锋于军
Owner HUAZHONG UNIV OF SCI & TECH
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