Insulation cover for crucible, and fabricating method

A technology for insulation sleeves and crucibles, which is applied to crucible furnaces, chemical instruments and methods, furnaces, etc., and can solve problems such as troublesome production and installation of insulation sleeves

Inactive Publication Date: 2007-07-25
SHENZHEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This crucible sleeve structure can cut off the induction eddy current loop in the insulation sleeve so that the power of induction heating can be distributed to the

Method used

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  • Insulation cover for crucible, and fabricating method
  • Insulation cover for crucible, and fabricating method

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Experimental program
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Effect test

Embodiment

[0015] The long-fiber graphite insulation felt with concentrated fiber arrangement and orientation is selected as the material for making the crucible insulation cover. In this graphite insulation felt, the fibers are arranged along a certain fixed direction or most of the fibers are distributed along a certain fixed direction. In this way, the thermal conductivity along this direction is much greater than that of other directions, that is, the thermal insulation performance along other directions is much better than that of the main arrangement direction of the long fibers.

[0016] Using the design scheme in Figure 5, the long-fiber graphite felt with concentrated fiber orientation is wrapped layer by layer outside the crucible, and the main arrangement direction of the fibers in the insulation felt is required to be parallel to the crucible axis. The crucible is a tungsten crucible with an outer diameter of 50 mm, and the thickness of the graphite felt insulation sleeve aro...

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Abstract

This invention discloses a method for producing thermal insulation sleeve of crucible with good thermal insulation performance by using highly oriented long-fiber graphite thermal insulation felt. The fibers in the thermal insulation felt are mainly oriented parallel to the axis of the crucible. The thermal insulation sleeve of crucible with this material and structure has good thermal insulation performance, and can better inhibit the generation of induced eddy current in the thermal insulation sleeve than traditional thermal insulation sleeve during induction heating of the crucible.

Description

technical field [0001] The invention relates to the selection of a crucible insulation cover material in high-temperature semiconductor material growth equipment and a manufacturing method of the crucible cover. Background technique [0002] Group III nitride semiconductor materials and devices have many uses in the field of optoelectronic technology, especially the deep ultraviolet light-emitting diodes made of aluminum nitride and aluminum nitride with high concentration of aluminum and gallium nitride or indium nitride compound materials have Wide application prospects. These applications include all solid-state white light illumination, sterilization and disinfection devices, compact analytical equipment used in biotechnology and pharmaceuticals, biological agent detection systems, compact ultraviolet light sources in covert communications, and short-wavelength lasers for high-density data storage. aspect. In addition, aluminum nitride single crystal is also an excelle...

Claims

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Application Information

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IPC IPC(8): C30B35/00C30B23/00F27B14/10
Inventor 敬守勇郑瑞生刘文
Owner SHENZHEN UNIV
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