Nitride single crystal seeded growth in supercritical ammonia with alkali metal ions
A supercritical and nitride technology, which is applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of shape and size limitation, fast growth in time limitation, inability to obtain large crystal seeds, etc., and reduce the time to achieve Effect
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Embodiment 1
[0215] Example 1 grows single crystal gallium nitride by crystallization from a supercritical ammonia-containing solution.
[0216] 100cm 3 The dissolution zone of the autoclave was filled with 7.1 g (about 102 mmol) of 6N metal gallium as a raw material. In addition, 4.4 g (about 190 mmol) of 4N metallic sodium was introduced into the autoclave.
[0217] Two elementary seed crystals are placed in the crystallization zone. The basic seed crystal is made of single crystal gallium nitride obtained by the HVPE method, and has a wafer shape. The orientation of the wafer is substantially perpendicular to the c-axis of the crystal. Each wafer is approximately 44 mm long and 200 μm thick. The wafer schematically shown in FIG. 1 has a fast-growing growth surface and has a merged surface at an angle α=45° relative to the growth surface. The basic seed crystals located in a plane are placed in a special holder, so as to provide an angle of 180° between the growth surfaces of the seed crysta...
Embodiment 2
[0223] The same procedure as in Example 1 is followed, with the only exception that the elementary seed crystals are pulled apart from each other parallel to their merging surfaces in the manner shown in FIG. 6a. The obtained crystal has similar values of FWHM, EPD, radius of curvature and electrical properties to the crystal obtained in Example 1. Similar to Example 1, the obtained crystals and the combined basic seed crystals are preserved to be used as seed crystals for free or lateral growth in the next process.
Embodiment 3
[0225] The same procedure as in Example 1 is followed, with the only exception that the elementary seed crystals are pulled apart from each other parallel to their merging surfaces in the manner shown in Figure 6b. The obtained crystal has similar values of FWHM, EPD, radius of curvature and electrical properties to the crystal obtained in Example 1. Similar to Example 1, the obtained crystals and the combined basic seed crystals are preserved to be used as seed crystals for free or lateral growth in the next process.
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