Laser device for cutting and method thereof

A laser cutting and laser technology, applied in auxiliary devices, laser welding equipment, welding/cutting auxiliary equipment, etc., can solve the problems of glass substrate cracking, cutting failure, crack growth and offset, etc., and achieve the effect of improving cutting quality

Inactive Publication Date: 2008-01-23
FOXSEMICON INTEGRATED TECHNOLOGY (SHANGHAI) INC +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The glass substrate will have a stress change due to the sharp temperature difference, and the stress change will generate a downward-growing crack at the position of the pre-cut line formed by the cutter wheel on the surface of the glass substrate, and then crack the entire glass substrate.
[0005] However, in the process of cutting the glass substrate with the above-mentioned laser cutting device, a certain amount of displacement energy is often generated outward on both sides of the pre-cut line on the glass substrate along a direction substantially perpendicular to the pre-cut line, and this displacement energy is likely to cause crack growth. Deviation out of the allowable cutting range, resulting in cutting failure

Method used

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  • Laser device for cutting and method thereof
  • Laser device for cutting and method thereof

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Embodiment Construction

[0013] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0014] Please refer to FIG. 1 , the laser cutting device 100 provided by the first embodiment of the present invention includes a carrying device 110 , a cracking device 120 , a laser generating device 130 , a cooling device 140 , and a clamping device 150 .

[0015] The carrying device 110 is used for carrying the brittle material substrate 200 to be cut. The material of the brittle material substrate 200 can be a brittle material such as ceramics, glass or quartz.

[0016] The cracking tool 120 is used to form a pre-cutting line 210 along a predetermined direction A on the brittle material substrate 200 . The splitting implement can be a diamond knife or a knife wheel.

[0017] The laser generating device 130 includes a laser source 132 for generating a laser beam 138 to irradiate and heat the brittle material substrate 200. The wavelen...

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Abstract

The invention discloses a laser cutting device, which is used for cutting brittle material base board along the preset direction. The laser cutting device comprises: a load device, which is used for loading the brittle material base board; a breakage tool, which is used for forming a pre-cutting line along the preset direction on the brittle material base board; a laser generating device, which is used for producing laser bean to heat the brittle material base board along the pre-cutting line; a cooling device, which is used for providing cooling liquid to cool the heated brittle material base board, to make the brittle base board break along the pre-cutting line; a clamp device, which comprises at least one pair of clamp components, which is used to clamp the brittle material base board from the two corresponding sides of the preset direction. The invention also provides a method of using the laser cutting device to cut brittle material baseboard.

Description

technical field [0001] The invention relates to a laser cutting device and method, in particular to a cutting device and method for cutting a brittle material substrate by using a laser beam. Background technique [0002] With the continuous development of display technology, thin film transistor liquid crystal display (Thin Film Transistor Liquid Crystal Display, TFT-LCD) and other liquid crystal display devices have been widely used in the consumer field, which is expected to replace the traditional cathode ray tube (Cathode Ray Tube, CRT) display device . [0003] A liquid crystal display device such as a TFT-LCD usually consists of two glass substrates, a liquid crystal material accommodated between the two glass substrates, and a number of circuits. The liquid crystal material can change the arrangement mode under the action of electric field to complete the display function of TFT-LCD. Generally, in order to form liquid crystal display panels of different sizes, it i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/00B23K26/04B23K26/06B23K26/42B23K37/04B23K26/046B23K26/064B23K26/38B23K26/70
CPCB23K26/064B23K26/38H01L21/78
Inventor 傅承祖黄俊凯陈献堂张明辉许宗富郭访璇
Owner FOXSEMICON INTEGRATED TECHNOLOGY (SHANGHAI) INC
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