Optical waveguide and its manufacture method thereof

Abstract

The invention provides a wafer-level optical waveguide and a manufacturing method. The invention adopts the semiconductor integrated circuit manufacturing process to manufacture micron optical waveguide with smooth contact surface, uniform thickness and an arbitrary angle mirror on end face, and significantly reduce the manufacturing cost.

Description

technical field [0001] The invention relates to the technical field of optoelectronic communication, in particular to a wafer-level optical waveguide and a manufacturing method thereof. Background technique [0002] With the rapid development of network communication technology, people's requirements for network information transmission speed are increasing day by day. The previous "electrical" interconnection, that is, the signal bandwidth that the copper wire-based electronic signal transmission line can carry is close to saturation, so optical communication based on optical interconnection technology has emerged as the times require. Optical interconnection is a technology that uses light as a carrier to transmit information to realize the interconnection between components or systems in the computer system structure. From the perspective of the transmission medium used in optical interconnection, there are mainly technologies such as optical waveguide interconnection, o...

AI Technical Summary

Problems solved by technology

This method also has its disadvantages, first of all, the process of manufacturing process is relatively long

After the soft mold is covered and then removed, it is easy to produce residues

In addition, the more serious problem is the mirror surface. The soft mold can only use the optical fiber material itself to make the mirror surface. The reflection effect of the mirror surface is limited by the material, which limits the reduction of optical signal loss.

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