Fe/MoS2 nano multilayer film and preparation method thereof

A nano-multi-layer and preparation process technology, applied in the coating, superimposed layer plating, solid-state diffusion coating and other directions, can solve the problem of hindering solid lubricity, not having solid lubricating performance, and the unsatisfactory lubricating efficiency of nano-multilayer film. and other problems, to achieve the effect of excellent tribological performance and strong practicability

Active Publication Date: 2008-03-26
王海斗 +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the "solid lubricant / metal" type nano-multilayer film also has a good solid lubrication effect, but because the metal in the multi-layer film is mainly used to help form the nano-multilayer film and the bonding strength between the nano-multilayer film and the substrate, It itself does not have solid lubricating properties, and it hinders the performance of solid lubricity in the nano-multilayer film, so the lubrication efficiency of the "solid lubricant / metal" type nano-multilayer film is not ideal

Method used

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  • Fe/MoS2 nano multilayer film and preparation method thereof
  • Fe/MoS2 nano multilayer film and preparation method thereof
  • Fe/MoS2 nano multilayer film and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] 1. RF sputtering Fe / Mo nano multilayer film:

[0044] Place the Mo target and the Fe target at the two target source positions respectively;

[0045] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0046] The substrate is heated to: 50°C before coating;

[0047] The working gas is: 99.999% high-purity Ar gas;

[0048] Vacuum degree: 2×10 -4 Pa;

[0049] Working air pressure: 2×10 -2 Pa;

[0050] Add negative bias voltage to improve deposition efficiency: 50V;

[0051] Setting voltage: 500V, current 100mA, self-bias 450V, sputtering power 100W;

[0052] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 9.37 seconds, and the deposition rate is 16nm / min;

[0053] When depositing the Fe layer, the residence time of the substrate in front of the Fe target is: 10 seconds, and the deposition rate is 15nm / min;

[0054] The thickness of the Fe / Mo nano-multilayer film bilayer is 5nm;

...

Embodiment 2

[0060] 1. RF sputtering Fe / Mo nano multilayer film:

[0061] Place the Mo target and the Fe target at the two target source positions respectively;

[0062] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0063] The substrate is heated to: 100°C before coating;

[0064] The working gas is: 99.999% high-purity Ar gas;

[0065] Vacuum degree: 1×10 -2 Pa;

[0066] Working air pressure: 5×10 -1 Pa;

[0067] Add negative bias voltage to improve deposition efficiency: 120V;

[0068] Setting voltage: 800V, current 220mA, self-bias voltage 750V, sputtering power 200W;

[0069] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 25 seconds, and the deposition rate is 12nm / min;

[0070] When depositing the Fe layer, the residence time of the substrate in front of the Fe target is: 40 seconds, and the deposition rate is 7.5nm / min;

[0071] The thickness of the Fe / Mo nano-multilayer film bilayer is...

Embodiment 3

[0077] 1. RF sputtering Fe / Mo nano multilayer film:

[0078] Place the Mo target and the Fe target at the two target source positions respectively;

[0079] The purity of the target material used is: Fe target 90-99.99%; Mo target 90-99.95%;

[0080] The substrate is heated to: 150°C before coating;

[0081] The working gas is: 99.999% high-purity Ar gas;

[0082] Vacuum degree: 2×10 -2 Pa;

[0083] Working air pressure: 2×10 0 Pa;

[0084] Add negative bias voltage to improve deposition efficiency: 200V;

[0085] Setting voltage: 1000V, current 400mA, self-bias voltage 950V, sputtering power 300W;

[0086] When depositing the Mo layer, the residence time of the substrate in front of the Mo target is: 100 seconds, and the deposition rate is 6nm / min;

[0087] When depositing the Fe layer, the residence time of the substrate in front of the Fe target is: 100 seconds, and the deposition rate is 6nm / min;

[0088] The finally obtained Fe / Mo nanometer multi-layer bilayer ha...

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Abstract

The present invention discloses one kind of nanometer multilayer FeS/MoS2 film prepared through one composite treating process including the first alternate deposition of Fe layers and Mo layers and the subsequent ionic sulfinuzing. The nanometer multilayer FeS/MoS2 film has the thickness ratio between the FeS layer and the MoS2 layer of 0.95-1.05, double layer thickness of 5-20 nm, and total thickness of 1-3 microns. The nanometer multilayer FeS/MoS2 film has excellent friction performance, excellent solid lubricating performance or so-called 'super lubricating performance'. It may be applied in various kinds of friction surface, especially precisely fitting surface, to reduce friction and improve lubricating condition.

Description

technical field [0001] The present invention relates to a kind of nanometer multilayer film and preparation method thereof, specifically a kind of FeS / MoS 2 Nano multilayer film and its preparation method. Background technique [0002] Solid lubrication refers to the use of certain solid materials with a special crystal structure and low shear strength to improve the friction and wear between friction pairs. It is a powerful supplement to fluid lubrication and is used in aerospace, atomic energy, military and many industries. Departments have important applications. For mechanical equipment parts working under special working conditions such as high temperature, high pressure, high load, ultra-low temperature, ultra-high vacuum, strong oxidation, and strong radiation, solid lubrication will play an irreplaceable role in lubrication. [0003] Solid lubricating film, that is, a thin film deposited by solid lubricant, can effectively avoid the adhesive wear and strain fatigue...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00C23C14/14C23C14/34C23C8/08
Inventor 王海斗刘家浚徐滨士
Owner 王海斗
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