Preparation of metal doped diamond-like surface ion liquid lubricant self-assembled lubricating film

A metal doping, ionic liquid technology, applied in lubricating composition, ion implantation plating, metal material coating process, etc., to achieve the effect of low surface roughness, good anti-friction, anti-wear and anti-adhesion performance, and dense film

Inactive Publication Date: 2009-06-24
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing a metal-doped diamond-like surface ionic liquid lubricant self-assembled film, which is expected to be an effective means to solve the protection and lubrication problems of materials in the fields of space machinery and information technology.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] (1) Use a single crystal silicon wafer as the substrate, thoroughly clean it before use, and place it in a vacuum chamber;

[0022] (2) Pre-exhaust the vacuum chamber pressure to less than 2.5×10 before sputtering -3 Pa. The silicon wafer surface was further cleaned by bombarding with Ar plasma for 10 min before depositing the film. Using TiAl target, Ar and CH 4 The gas is used as sputtering and reaction gas, and the flow rate of Ar gas entering the vacuum chamber is controlled to be 150 sccm, CH 4 The gas flow rate is 30sccm, the total reaction pressure is 0.60Pa, the deposition power is 700W, and the substrate negative bias voltage is 100V to prepare a metal-doped diamond-like carbon film;

[0023] (3) Dissolving 1-allyl-3-hexylimidazolium hexafluorophosphate ionic liquid in dichloromethane to prepare a 0.5% (W / V) solution;

[0024] (4) the metal-doped diamond-like carbon film that will make is immersed rapidly in the ionic liquid lubricant solution that prepares...

Embodiment 2

[0026] (1) Change the used 1-allyl-3-hexylimidazolium hexafluorophosphate ionic liquid into 1-methyl-3-tributylphosphinoimidazolium hexafluorophosphate ionic liquid;

[0027] (2) Other steps are the same as in Example 1.

Embodiment 3

[0029] (1) Change the used 1-allyl-3-hexylimidazolium hexafluorophosphate ionic liquid into an ionic liquid containing bis-imidazolium hexafluorophosphate;

[0030] (2) Other steps are the same as in Example 1.

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Abstract

The invention discloses a method for preparing a metallic contamination adamantine surface ionic liquid lubricant self-assembly lubricative film. The method takes ionic liquid lubricant as raw material, adopts magnetron sputtering equipment to prepare a metallic contamination adamantine carbon film and assembles the liquid lubricant film which is stable, uniform and ordered on the carbon film. The method is characterized in that the preparation process is operated at normal temperature, and the requirements for the material and the shape of a substrate are lower; the film is stable and uniform, and has lower surface roughness; the film also has good performances on antifriction, wear resistance and adhesion resistance. The test of friction and wear proves that the ionic liquid lubricant and adamantine has good combining performance and better performances on antifriction, wear resistance and adhesion resistance, so that the lubricative film is expected to become the effective means of solving the problems of protecting and lubricating materials I the technical fields such as space machinery, information technology, etc.

Description

technical field [0001] The invention relates to a method for preparing a metal-doped diamond-like surface ionic liquid lubricant self-assembled lubricating film. Background technique [0002] Diamond-like carbon (DLC) film has high hardness, low friction coefficient, high wear resistance and good chemical stability, thermal conductivity, electrical insulation, light transmission and biocompatibility as a new functional film material in mechanical resistance It has broad application prospects in abrasive coatings, optical windows, microelectromechanical systems (MEMS) and semiconductor materials. However, studies have found that huge internal stress and poor bonding force are two major defects of diamond-like carbon film, which largely restrict its development. The internal stress of the diamond-like carbon film is as high as several GPa, which not only reduces the bonding strength between the film and the substrate, causes the failure of the film during use, but also limits...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/06C23C14/02C23C14/54C10M107/48C10N50/08
Inventor 石雷刘维民蓬显娟
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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