Preparation of metal doped diamond-like surface ion liquid lubricant self-assembled lubricating film
A metal doping, ionic liquid technology, applied in lubricating composition, ion implantation plating, metal material coating process, etc., to achieve the effect of low surface roughness, good anti-friction, anti-wear and anti-adhesion performance, and dense film
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0021] (1) Use a single crystal silicon wafer as the substrate, thoroughly clean it before use, and place it in a vacuum chamber;
[0022] (2) Pre-exhaust the vacuum chamber pressure to less than 2.5×10 before sputtering -3 Pa. The silicon wafer surface was further cleaned by bombarding with Ar plasma for 10 min before depositing the film. Using TiAl target, Ar and CH 4 The gas is used as sputtering and reaction gas, and the flow rate of Ar gas entering the vacuum chamber is controlled to be 150 sccm, CH 4 The gas flow rate is 30sccm, the total reaction pressure is 0.60Pa, the deposition power is 700W, and the substrate negative bias voltage is 100V to prepare a metal-doped diamond-like carbon film;
[0023] (3) Dissolving 1-allyl-3-hexylimidazolium hexafluorophosphate ionic liquid in dichloromethane to prepare a 0.5% (W / V) solution;
[0024] (4) the metal-doped diamond-like carbon film that will make is immersed rapidly in the ionic liquid lubricant solution that prepares...
Embodiment 2
[0026] (1) Change the used 1-allyl-3-hexylimidazolium hexafluorophosphate ionic liquid into 1-methyl-3-tributylphosphinoimidazolium hexafluorophosphate ionic liquid;
[0027] (2) Other steps are the same as in Example 1.
Embodiment 3
[0029] (1) Change the used 1-allyl-3-hexylimidazolium hexafluorophosphate ionic liquid into an ionic liquid containing bis-imidazolium hexafluorophosphate;
[0030] (2) Other steps are the same as in Example 1.
PUM
Property | Measurement | Unit |
---|---|---|
friction coefficient | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com