Method for producing two-dimensional polymer photon crystal using flexible offset printing
A lithography and photonic crystal technology, which is applied in the field of soft lithography to make two-dimensional polymer photonic crystals, can solve the problems of low modulus of PDMS templates, and achieve the effect of high fidelity and high production capacity
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[0032] Example 1: Fabrication of two-dimensional ultraviolet acrylic polymer photonic crystals.
[0033] The materials used in the examples are as follows:
[0034] UV acrylic polymer model WIR30-470, produced and sold by Korea ChemOptics company.
[0035] The electronic etching glue is ZEP520A, produced and sold by Japan ZEON Company.
[0036] ZED-N50 solvent: developer for electronic etching adhesive ZEP520A, produced and sold by Japan ZEON Company.
[0037] PDMS model Sylgard 184, specific gravity of 1.11, viscosity of 5000cSt, produced and sold by Dow Coming.
[0038] Proceed as follows:
[0039] (1) Fabrication of substrate with triangular cavity structure
[0040]Using JEOL JBX6000 electron beam lithography (EBL) equipment, apply a layer of electronic resist (ER) ZEP520A on the silicon substrate, the pattern is determined and printed by EBL, and the exposed electronic resist is in the ZED-N50 solvent After developing and developing, it is baked on a baking tray at 100°C for ...
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