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Nuclear magnetic resonance spectrum detection plane micro coil and its manufacture method

A nuclear magnetic resonance spectrum and detection plane technology, applied in magnetic resonance measurement, nuclear magnetic resonance analysis, coils, etc., can solve the problems of difficult micro-analysis system integration, low detection sensitivity, and difficult production of micro-spiral micro-coils, etc. Achieve the effect of less demanding production conditions, simple production methods, and high aspect ratio

Inactive Publication Date: 2011-11-09
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is that the micro-spiral micro-coil of the prior art is not easy to manufacture, difficult to integrate with the micro-analysis system, and the problem of low detection sensitivity. A method for making a planar micro-coil is proposed. Mechanical system process photoresist mask molding and copper micro-plating method, the fabricated planar micro-coil can significantly improve the detection sensitivity of nuclear magnetic resonance

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  • Nuclear magnetic resonance spectrum detection plane micro coil and its manufacture method
  • Nuclear magnetic resonance spectrum detection plane micro coil and its manufacture method
  • Nuclear magnetic resonance spectrum detection plane micro coil and its manufacture method

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Embodiment Construction

[0051] figure 1 Shown is a cross-sectional view of a planar microcoil and an insulating substrate for NMR detection. The thickness of the planar microcoil 1 depends on the material of the planar microcoil 1 and the experimental conditions of nuclear magnetic resonance detection. The micro-channel 3 can be used to detect a single compound, or to observe the chemical reaction process of multiple compounds. When the NMR detection system is working, the static magnetic field B 0 Along the positive direction of the y-axis, the planar microcoil 1 is located on the upper surface of the insulating substrate 2 and is located in the xoy plane, and the microchannel 3 is located in the insulating substrate 2 and directly below the planar microcoil 1, and is parallel to the planar microcoil 1 , the distance between the two is about 100 μm to have a higher degree of coupling.

[0052] In the present invention, the planar microcoil 1 is electroplated on the upper surface of the insulating...

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Abstract

The invention discloses a nuclear magnetic resonance testing planar micro coin and a method for production. A planar micro coin (1) takes a spiral shape and is located on the upper surface of an insulating substrate (2), and the planar micro coin (1) is made of copper. The material of the insulating substrate (2) is glass or polymer. The planar micro coin (1) is provided with an inside end pad and an outside end pad (4, 5), the planar micro coin (1) is integrated with the corresponding two ends pads, and thereby a copper micro electroplating is formed. The thickness of the pads (4, 5) is samewith the thickness of the planar micro coin (1). The method for production of the planar micro coin (1) comprises a photo resist mask process and a copper micro electroplating process, wherein the photo resist mask process is used for making masks which are used for micro electroplating, while the copper micro electroplating process is used for making the planar micro coils of micrometer structure preciseness in photo resist mask. The planar micro coils of the invention can be used for component and molecular structural analysis of nuclear magnetic resonance upgrading samples, and can be usedfor nuclear magnetic resonance micro-imaging as tests for mono cells.

Description

technical field [0001] The invention relates to a planar microcoil for nuclear magnetic resonance detection and a manufacturing method thereof, in particular to a planar microcoil for nuclear magnetic resonance spectrum detection of trace chemical samples and a manufacturing method thereof. Background technique [0002] NMR micro-detection technology is developed on the basis of conventional NMR detection technology. Conventional NMR detection technology refers to: based on the principle of nuclear magnetic resonance, using a 5mm solenoid probe to analyze the molecular composition and structure of bio-chemical samples , biological tissue analysis, pathological analysis, medical diagnosis and non-destructive monitoring of industrial products, etc. However, compared with other mature chemical analysis techniques, the mass sensitivity of conventional NMR detection techniques is relatively small, the minimum is only 10 -9 mol. Swiss scientist C.Massin found (C.Massin, F.Vincen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/34G01N24/08H01F5/00
Inventor 李晓南赵武贻王明杨文晖
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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