Technique and deice for preparing high purity boron trifluoride gas

A boron trifluoride and gas technology, which is applied in the field of preparing high-purity boron trifluoride gas, can solve the problems of high impurity content of boron trifluoride gas, large amount of sulfuric acid, equipment corrosion, etc., and achieve safe operation of equipment and simple equipment , the effect of convenient operation

Active Publication Date: 2008-07-09
RES INST OF PHYSICAL & CHEM ENG OF NUCLEAR IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The disadvantage of the above method is that the boron trifluoride gas has high impurity content and low purity, and solid residues that are difficult to remove remain in the reactor, and the amount of sulfuric acid is large, which seriously corrodes the equipment.

Method used

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  • Technique and deice for preparing high purity boron trifluoride gas

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] First, 2 kg of elemental boron with a purity of 92% is added into the reactor, and the reactor is preheated to 150° C. Use liquid nitrogen to freeze the purifier 4 to -185°C, open the valve 3, the fluorine gas in the buffer tank 1 enters the purifier 4 for liquefaction and collection, after the purifier 4 is collected, close the valve 3 to remove most of the hydrogen, oxygen and nitrogen Waiting for high boiling point substances, heat up the purifier 4, gradually thawed fluorine gas enters the fluorine gas storage tank 5 through the pipeline, and the purifier 4 heats up to -140 ° C, and stops heating up. At this time, the pressure of the fluorine gas storage tank 5 is 0.18Mpa. Open the reactor inlet valve and the fluorine gas enters the reactor 6 through the pipeline to carry out the synthesis reaction with elemental boron, and the reaction product is boron trifluoride gas (BF 3 ).

[0032] Analyzing the composition of the gas at the outlet of the reactor, the gas con...

Embodiment 2

[0038]2 kg of elemental boron with a purity of 92% was added into the reactor, and the reactor was preheated to 240° C. Use liquid nitrogen to freeze the purifier 4 to -195°C, open the valve 3, the fluorine gas in the buffer tank 1 enters the purifier 4 for liquefaction and collection, after the purifier 4 is collected, close the valve 3 to remove most of the hydrogen, oxygen and nitrogen Waiting for high boiling point substances, heat up purifier 4, gradually thawed fluorine gas enters fluorine gas storage tank 5 through pipeline, purifier 4 heats up to -145 ℃, stops heating up. At this moment, the pressure of the fluorine gas storage tank 5 is 0.15Mpa. Open the reactor inlet valve 3 and fluorine gas enters the reactor 6 through the pipeline to carry out the synthesis reaction with elemental boron, and the reaction product is boron trifluoride gas (BF 3 ).

[0039] Analyzing the composition of the gas at the outlet of the reactor, the gas contains a small amount of hydrogen...

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PUM

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Abstract

The invention discloses a process for preparing a gas of high-purity boron trifluoride and an installation. The process comprises producing the gas of boron trifluoride by means of directly synthesizing fluoride and elemental boron and preparing the gas high-purity boron trifluoride through dedusting and rectifying the impure gas of boron trifluoride. The installation of the invention mainly comprises a buffer tank, a purifier, a fluoride storage tank, a reactor, a dust remover, a rectifying still, a condenser, an absorber and a vacuum group. The gas of boron trifluoride produced by employing the process and installation of the invention has the advantages of high purity, simple installation, convenient operation, safe operation of the installation, continual production and the like.

Description

technical field [0001] The invention belongs to a method and equipment for preparing high-purity boron trifluoride gas, and specifically relates to a method for preparing boron trifluoride gas by using fluorine gas and simple boron as raw materials, and then performing dust removal and rectification on the boron trifluoride gas. A process method and equipment capable of stably preparing high-purity boron trifluoride gas. Background technique [0002] High-purity boron trifluoride gas is the P-type doping source for silicon and germanium epitaxy, diffusion and ion implantation; high-purity boron trifluoride gas can be used as a raw material for preparing optical fiber preforms; high-purity boron trifluoride is used in many organic In reactions and petroleum products, it can be used as a catalyst for polymerization, alkylation and condensation reactions; high-purity boron trifluoride is used in proportional neutron counters and controllable neutron reactors. 10 f 3 B in 10 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B35/06
Inventor 陈光华倪志强
Owner RES INST OF PHYSICAL & CHEM ENG OF NUCLEAR IND
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