High temperature heating vacuum evaporation film coating device

Abstract

The invention relates to a vacuum evaporation coater with high temperature heating, belonging to the field of electromechanical technique. The invention comprises a bell jar, substrate clips and evaporating chambers which are positioned in a foundation bed. A heating device is arranged in the evaporating chamber. At least two groups of the substrate clips, the evaporating chambers and the heating device are prepared; each substrate clip is installed on the foundation bed of the substrate clip; the invention also comprises a driving device which drives the foundation beds of the substrate clip to relatively lift and rotate. The vacuum evaporation coater of the invention has the advantages that more than two different materials can be simultaneously evaporated and various materials can be successively evaporated by the substrate clips, thus avoiding cross contamination and ensuring the purity of evaporants, meanwhile, the vacuum evaporation coater can improve the utilization of the evaporants, save time, simplify operating procedure and enhance adhesive properties of substrates and evaporation materials.

Description

technical field [0001] The invention belongs to the technical field of electronic machinery, in particular to a vacuum evaporation coating device in the electronic thin film preparation technology. Background technique [0002] Vacuum evaporation coating is a method of heating the raw material to be formed in the evaporation container in a vacuum chamber, making its atoms or molecules gasify and escape from the surface, forming a vapor flow, incident on the solid surface, and condensing to form a solid film. The main physical process of vacuum coating method or vacuum coating method is produced by heating and evaporating materials, so it is also called thermal evaporation method. [0003] Generally speaking, compared with film-forming methods such as chemical vapor deposition and sputtering coating, vacuum evaporation has the following characteristics: simple equipment and easy operation; the produced film has high purity, good quality, and thickness can be controlled more a...

AI Technical Summary

Problems solved by technology

[0004] In the existing traditional vacuum evaporation system, even if there are two or more evaporation sources, a single evaporation chamber is used. The disadvantage of this structure will make it easy for different evaporation materials to contaminate each other during the evaporation process.

When evaporating a substance with a high melting point, a part of the substance with a low melting point remaining in the evaporation chamber will be evaporated onto the substrate together with the substance with a high melting point, thus affecting the purity of the evaporated substance

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