Method for preparing organic electroluminescent display mask plate

A manufacturing method and a masking plate technology, which are applied in vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the difficulty of controlling line spacing and tension consistency, increasing the difficulty of vacuum chamber operation, alloy The distance between wires is not easy to control, etc., to achieve good evaporation effect, meet the precision requirements, and not easy to deform and bear the force

Inactive Publication Date: 2008-08-27
TRULY SEMICON
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Problems solved by technology

[0004] Chinese invention patent "Manufacturing Method of Organic Vacuum Coating Mask Plate" (0013136.0) discloses a technical solution of fixing the alloy wire on the iron bar with solder to maintain tension. However, after the vacuum coating of the mask plate, the iron bar The alloy wire above is easy to loosen, which directly affects the tensile force, and the line distance between the alloy wires is not easy to control; also, the Chinese invention patent "Mask Plate for Vacuum Evaporation Linear Mask" (0311675.9), the disclosed technical solution Although the mesh stretching of alloy wire can be realized, it is composed of many parallel wires, and each wire must be stretched independently, which makes it difficult to control the wire spacing and tension consistency, and after the stretching is completed , the fixing frame is fixed with screws, which increases the difficulty of operation in the vacuum chamber
Moreover, the above two methods are not easy to control the accuracy, and the highest accuracy can only reach 3 lines / mm. However, for OLED pixels (that is, one R, G, B unit), the line width of 1mm is already very large. However, the sum of the line widths R, G, and B used in practice is about 200 μm, and its accuracy is much higher than the single line width of 1 mm.

Method used

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  • Method for preparing organic electroluminescent display mask plate
  • Method for preparing organic electroluminescent display mask plate

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Embodiment Construction

[0030] As shown in Fig. 1, Fig. 4 and Fig. 5, a kind of manufacturing method of organic electroluminescent display mask plate of the present invention comprises the following steps:

[0031] (1) Take a magnetically conductive thin steel sheet, cut it into the required size and shape, use stainless steel etching or laser cutting to open holes on the thin steel sheet to form a pattern, and the pattern is made according to the shape required by the OLED design.

[0032] Among them, the specific process of stainless steel etching is: first, design the pattern according to the requirements of the product model size and typesetting method, make a film, or use a chrome plate to expose the substrate; take a magnetically conductive thin steel sheet, for example, the model is SUS430 , INVAR36 and other magnetically conductive stainless steel, the thickness of the magnetically conductive thin steel sheet is 20-150 μm, the magnetically conductive thin steel sheet is cut into the size requi...

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Abstract

The invention discloses a method for producing mask plates of organic electroluminescent displays, which comprises following steps: taking a sheet of magnetic conductive thin sheet steel, utilizing stainless steel etching or laser cutting to open holes on the thin sheet steel to form patterns, flatly spreading a silk screen on the thin sheet steel with the patterns, coating mucilage which is used to stretch the silk screen on the edge of the thin sheet steel, then, removing the silk screen on the region of thin sheet steel patterns, then, stretching the silk screen, taking a frame body, clinging the frame body on the stretched silk screen to form a net frame, tailoring along the outer margin of the net frame after bonding stably, cutting another magnetic conductive sheet steel into an outer frame of the mask plate which is needed, then, connecting the outer frame of the mask plate and the magnetic conductive thin sheet steel in the net frame, then, cutting off the silk screen, shedding the net frame, lastly, cutting off excess sheet steel along the outer margin of the outer frame of the mask plate, and finishing producing the mask plate. The method of the invention utilizes the silk screen to stretch the thin sheet steel, which lowers the production cost and simplifies the technological process, the net frame is more stably connected with the outer frame, the operation is comparatively simpler, and the precision is greatly increased.

Description

technical field [0001] The invention relates to a vacuum coating component used in the display manufacturing process, in particular to a manufacturing method of an organic electroluminescent display mask plate. Background technique [0002] The start and development of the organic electroluminescent display (OLED) industry has brought opportunities for my country's position in the display industry in the world. At present, the masks used for vacuum coating in the OLED production process are basically produced in Japan, South Korea and other countries, and most of the domestic OLED masks are imported from Japan, South Korea and other countries, because the mask processing accuracy requirements It is very high, which means that it is difficult to stretch and weld metal materials, which makes the manufacturing process very complicated and makes the price of the mask very expensive. [0003] The OLED coating mask is composed of a magnetically permeable thin stainless steel shee...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
Inventor 柯贤军苏君海谢志生
Owner TRULY SEMICON
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