Process for producing substrate with metal wiring
A manufacturing method and metal wiring technology, applied in the field of substrate manufacturing, can solve the problems of complicated operation and difficulty in forming shapes, and achieve the effect of low-cost productivity
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[0104] Example 1
[0105] (1) Preparation of positive photosensitive resin composition
[0106]The following components are mixed to obtain a positive photosensitive resin composition (resist solution), the components are: a mixed cresol of m-cresol / p-cresol (mass mixing ratio=5:5) and formaldehyde in oxalic acid 17.7 parts by mass of novolak resin (weight average molecular weight = about 5500) obtained by polycondensation under the existing conditions, composed of 2,3,4,4'-tetrahydroxybenzophenone and 1,2-naphthoquinonediazide-5 -4.3 parts by mass of a quinonediazide group-containing compound having an esterification rate of 70% by sulfonyl chloride, and a siloxane-based surfactant having a siloxane bond "SH29PA" [東レ·ダウコ一ニング·シリコMade by One Company] 0.05 parts by mass, and 107.4 parts by mass of propylene glycol monomethyl ether acetate (PGMEA).
[0107] (2) Formation of inverted trapezoidal resist pattern
[0108] The resist solution obtained in (1) was coated on a glass substrat...
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[0113] Examples 2, 3
[0114] The substrates with metal wiring were obtained in the same manner as in Example 1 except that the reaching pressure during the reduced-pressure drying was changed.
[0115] Table 1 shows the evaluation results of the reaching pressure and the treatment time during the reduced-pressure drying treatment, the cross-sectional shape of the resist pattern, and the shape of the metal vapor deposited film pattern after peeling.
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