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Minisize multifunctional optical devices and method for making same

An optical device, multi-functional technology, applied in optical components, optics, opto-mechanical equipment, etc., can solve problems such as increasing the difficulty of system maintenance, not conducive to equipment miniaturization, reducing system reliability, etc., to achieve self-alignment, reduce Difficulty and cost, the effect of high isolation

Active Publication Date: 2008-10-22
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This will increase the cost of equipment, reduce system reliability, increase the difficulty of system maintenance and is not conducive to the miniaturization of equipment

Method used

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  • Minisize multifunctional optical devices and method for making same
  • Minisize multifunctional optical devices and method for making same
  • Minisize multifunctional optical devices and method for making same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Embodiment 1: The following steps are adopted when making a micro-optical device with a single-ended unequal-height support beam:

[0030] 1. The starting material is double-throwing N-type (100) silicon wafer 11 (such as Figure 7a shown), the thickness is 400±10 microns;

[0031] 2. Form a silicon oxide 12 mask on the silicon wafer 11, and then etch a deep groove 13. The depth of the deep groove 13 determines the gap between the fixed electrode 3 and the movable electrode 5 on the glass substrate;

[0032] 3. If Figure 7b As shown, the silicon oxide mask 12 is removed, and the surface of the silicon wafer 11 is doped 14 by ion implantation or diffusion process to form an ohmic contact;

[0033] 4. If Figure 7c Shown, make metal electrode 15 on glass substrate 8, as the lead electrode of micro-drive structure;

[0034] 5. If Figure 7d As shown, the glass substrate 8 and the silicon wafer 11 are anodically bonded, and the silicon wafer 11 is thinned to the thick...

Embodiment 2

[0037] Embodiment 2: The following process is adopted when making a micro-optical device with unequal-height support beams at both ends:

[0038] 1. The starting material is double-throwing N-type (100) silicon wafer 11 (such as Figure 7a shown), the thickness is 400±10 microns;

[0039] 2. At first, silicon oxide mask 19 is formed on silicon wafer 11, and then photoresist mask 20 is formed on silicon oxide mask 19 surface (such as Figure 8a shown), and then form a composite mask of silicon oxide and photoresist; then use photoresist 20 as a mask to etch deep grooves 21 (such as Figure 8b shown), the depth of the deep groove 21 determines the lower end height difference between the combined torsion beam 7 and the folded beam 6 (comprising 71, 72, 73 etc. beams) (as Figure 8c shown);

[0040] 3. Remove the photoresist mask 20, and use the silicon oxide mask 19 as a mask to etch the silicon wafer 11 to form a deep groove 22. The depth of the deep groove 22 determines the ...

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Abstract

The invention relates to a micro multifunctional optical device and a method for making the same. The optical device is characterized in that: the optical device comprises a fixed electrode, a movable electrode, a support beam, an anchor point, a glass substrate, a light reflection module and optical fiber grooves; the head of the light reflection module is in a triangular shape; an input optical fiber groove is arranged over against the head of the reflection module; corresponding to the reflection surfaces on two sides of the triangular light reflection module, tow output optical fiber grooves are oppositely arranged to be perpendicular to the input optical fiber groove; input optical fiber and output optical fiber are respectively arranged in the input optical fiber groove and the output optical fiber grooves. The optical device realizes adjustable light splitting function and optical switching function through a comb type electrostatic driver moving light reflection module consisting of the fixed electrode and the movable electrode, and realizes light attenuation function through a flat-type electrostatic driver twisted light reflection module consisting of the fixed electrode and the movable electrode at the same time. The optical device is simple in making process and compatible with MEMS device process of various species, and can be used to realize the glimmer integration systems with more powerful functions.

Description

technical field [0001] The invention relates to a multifunctional optical device and a preparation method thereof, in particular to a miniature multifunctional optical device with the mixed functions of adjustable light splitting, optical switch and variable optical attenuator and a preparation method thereof. Background technique [0002] Tunable optical splitters, optical switches, and variable optical attenuators realized by microelectromechanical systems (MEMS) technology have the advantages of small size, light weight, low energy consumption, and stable performance. With the rapid development of optical fiber communication technology and dense wavelength division multiplexing systems, MEMS tunable optical splitters, optical switches and variable optical attenuators, as important optical waveguide devices, have been more and more widely used. There have been many reports on the research on MEMS tunable optical splitters, optical switches and variable optical attenuators....

Claims

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Application Information

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IPC IPC(8): G02B26/08G03F7/00B81C1/00
Inventor 吴文刚陈庆华王子千邹积彬闫桂珍郝一龙王阳元
Owner PEKING UNIV
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