Preparation of low-phosphorus solar-grade polysilicon
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SOUTH CHINA NORMAL UNIVERSITY
- Publication Date
- 2008-11-12
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a semiconductor processing technology, in particular to a method for preparing low-phosphorus solar grade polysilicon. Background technique
[0002] Polycrystalline silicon is the basic raw material for preparing silicon solar cells, various silicon discrete devices and various silicon integrated circuits, and is an important raw material for the development of solar energy industry and information microelectronics industry.
[0003] Metal silicon contains a large amount of metal impurities and non-metal impurities, which seriously affect the efficiency of solar cells and cannot meet the requirements of silicon raw materials required by the solar cell industry. It is necessary to purify 1N-2N industrial silicon to 6N-7N solar-grade polysilicon and 9N-12N electronic-grade polysilicon.
[0004] In the prior art, there are chemical methods and physical methods for the purification of metal silicon.
[0005] Chemical methods main...