Method for preparing high purity polysilicon particle with fluidized bed and bed fluidizing reactor
A fluidized bed reactor, polysilicon technology, applied in chemical instruments and methods, from chemical reactive gas, polycrystalline material growth, etc., can solve the problem of silicon-containing reaction gas back-mixing, separation of heating zone and reactor, Problems such as wall deposition in the heating zone, to achieve the effects of reducing overall energy consumption, great flexibility, and silicon deposition suppression
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[0032] The specific implementation manner of preparing high-purity granular polysilicon particles by using a fluidized bed reactor according to a preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
[0033] figure 1 Schematic diagram of the structure of the embodiment of the fluidized bed reactor provided by the present invention. In this embodiment, the fluidized bed reactor comprises a reaction zone cylinder wall 5, a perforated guide cylinder 6 coaxial with the reactor cylinder wall and a reaction zone 7 inside thereof, and the reaction zone located at the lower part of the reaction zone 7 is fluidized. Gas distributor 2 and fluidization gas inlet 1 in the reaction zone, polysilicon particle product outlet 3 connected to the lower part of the perforated draft tube, expansion section 8 located at the upper part of the reaction zone, silicon seed storage tank 10 located at the upper part of the expanded ...
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