Micro hollow silicon needle and preparation method thereof

Abstract

The invention discloses a tiny hollow silicon probe, the needle of which takes the shape of a pyramid. A needlepoint or the side wall of a microneedle has a through hole which is vertical to a silicon substrate. The height of the tiny hollow silicon probe is 100-600 micron. The diameter of the through hole is larger than 5 micron. The invention also discloses a preparation method of the tiny hollow silicon probe which comprises that: a hole or hole arrays with the depth reaching or being close to the thickness of the silicon are processed through a method of anisotropy chemical etch on the reverse side of monocrystalline silicon chips on crystal orientation; on the positive side of the silicon, by adopting an anisotropy wet chemistry etch method, a pyramid-shaped tiny silicon probe is processed and the through hole which is connected with the reverse side of the silicon is exposed. The tiny hollow silicon probe array prepared by the invention not only has stable structure, but also is simple in manufacture technology, short in manufacture cycle, low in cost, high in the rate of finished products and good in repetitiveness.

Description

technical field [0001] The invention relates to the technical fields of medical treatment and semiconductor microprocessing, in particular to a micro hollow silicon needle and a preparation method thereof. Background technique [0002] Human skin has three layers of tissue: stratum corneum, active epidermis and dermis. The thickness of the outermost stratum corneum is about 10-50 microns, which is composed of dense corneocytes; below the stratum corneum is the epidermis, which is about 50-100 microns in thickness, contains active cells and a small amount of nerve tissue, but has no blood vessels . Below the epidermis is the dermis, which is the main component of the skin and contains a large number of living cells, nerve tissue, and blood vessel tissue. Since the outer diameter of the injection needle used in the traditional hypodermic injection method is generally 0.4 to 3.4 mm, the injection needle needs to penetrate the surface layer of the skin and go deep under the sk...

AI Technical Summary

Problems solved by technology

[0006] In the process of realizing the present invention, the inventors have found that there are at least the following problems in the prior art: in the prior art, the hole spacing of the hole arrays produced by the electrochemical corrosion technology is very small (usually less than 30 microns), and all obtained is a very dense array of hole...

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