Normal atmosphere plasma strip steel film coating process
A technology of atmospheric pressure plasma and strip steel, applied in the direction of plasma, metal material coating process, gaseous chemical plating, etc., can solve the problems of complex equipment, expensive production and maintenance costs, high one-time investment costs, etc., and achieve low operating costs Effect
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Embodiment 1
[0042] Using Nitrogen as Carrier Gas and HMDSO as Precursor to Generate Townsend Discharge to Plating Steel Strip with SiO 2 .
[0043] In this embodiment, nitrogen is selected as the carrier gas, DBD produces Townsend discharge, and SiO is plated on cold-rolled steel coils. 2 film.
[0044] In the DBD section, under normal pressure, 20sccm nitrogen gas is introduced, and the content of HMDSO is at 20ppm, ensuring that [N 2 O] / [HMDSO] ratio around 24 to achieve SiO 2 film.
[0045] The frequency of the voltage is 6kHz, and the discharge density is 0.1~2W / cm 2 between.
[0046] The cold-rolled sheet passes through at 20m / min, which can achieve 50-100nm SiO 2 coating products.
[0047] When the width of the cold-rolled sheet is in the range of 300mm, the fluctuation of the film thickness is within 3%. Its film structure is as figure 1 As shown, it can be seen that what is deposited is SiO 2 film.
Embodiment 2
[0049] Nitrogen as carrier gas, SiH 4 Thomson discharge used as precursor to realize SiO plating on steel strip 2 .
[0050] In this embodiment, nitrogen is selected as the carrier gas, DBD produces Townsend discharge, and SiO is plated on cold-rolled steel coils. 2 film.
[0051] In the DBD section, under normal pressure, nitrogen gas is passed at a rate of 5 sccm, SiH 4 The content is kept at 5ppm, O 2 The content is kept at 15ppm.
[0052] The frequency of the voltage is selected within the range of 1 ~ 10kHz, and the discharge density is 3.4W / cm 2 between. The range from the steel plate is adjustable within 1-2mm.
[0053] The cold-rolled sheet passes through at 10m / min, which can achieve 50-100nm SiO 2 coating products.
[0054] When the width of the cold-rolled sheet is in the range of 300mm, the thickness fluctuation of the film is within 5%. XPS analysis results show that the surface is SiO 2 structure, the refractive index is in the range of 1.15 to 1.4. A...
Embodiment 3
[0056] Using nitrogen as carrier gas, TiO[CH 3 COCH=C(O-)CH 3 ] 2 Thomson discharge as a precursor for stainless steel coil plating with TiO 2 .
[0057] In this example, nitrogen is selected as the carrier gas, and TiO[CH 3 COCH=C(O-)CH 3 ] 2 As a precursor to generate Townsend discharge, TiO plating on stainless steel coils 2 film.
[0058] In the DBD section, under normal pressure, nitrogen gas is introduced at a rate of 5 sccm, the content of oxygen is 20%, and TiO[CH 3 COCH=C(O-)CH 3 ] 2 The flow rate is kept between 0.02 and 1mol / l.
[0059] The frequency of the voltage is selected as 100kHz, and the distance from the steel plate is 1mm.
[0060] If the stainless steel plate is preheated to 200-300 degrees and passes through it at 10 m / min, 20-50nm TiO can be achieved. 2 coating products. The content of oxygen element in the coating is directly proportional to the content of oxygen in the incoming gas. As the preheating temperature increases, the content of...
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