Excimer lamp

An excimer lamp and excimer technology, which is applied in the field of excimer lamps and can solve problems such as peeling off of the end of the ultraviolet reflective film 104
CN101459035AActive Publication Date: 2009-06-17USHIO DENKI KK
4 Cites 2 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
USHIO DENKI KK
Publication Date
2009-06-17

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention provides an excimer lamp, wherein an ultraviolet reflection membrane is capable of transmitting the infrared light and the temperature difference of a discharging container and the ultraviolet reflection membrane is reduced and the ultraviolet reflection membrane is prevented from being peeled and the radiation amount of the excimer light is kept at preset range for long time. The excimer lamp (10) comprises: a discharging container (11) formed by silicon dioxide glass with discharge space and a pair of electrodes (12, 13) in the silicon dioxide glass of the discharging container (11) wherein the discharge space (S) is filled with xenon-133 gas and the excimer discharge happens in the discharge space (S). Exposed on the inner surface of the discharging container (11) of the excimer discharge, the ultraviolet reflection membrane is composed of ultraviolet scattered particles containing silicon dioxide particles and the transmissivity is more than 10% when the light of wavelength 4560nm transmits the ultraviolet reflection membrane and the transmission thickness is 1mm.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The present invention relates to an excimer lamp including a discharge vessel made of silica glass and a pair of electrodes interposing the silica glass forming the discharge vessel, and excimer discharge occurs in the discharge vessel. Background technique

[0002] In recent years, by irradiating vacuum ultraviolet light with a wavelength of 200nm or less on the object to be treated made of metal, glass or other materials, using the effect of vacuum ultraviolet light and the ozone generated thereby, for example, removing the adhesion to the object to be treated Cleaning treatment technology for organic pollutants on the surface of the object, or oxide film formation treatment technology for forming an oxide film on the surface of the object to be treated, and put into practical use the technology for treating the object to be treated.

[0003] As a device for irradiating vacuum ultraviolet light, for example, there is known an excimer lamp which forms...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More