Manufacturing method for zinc oxide transparent electrode used for flat-panel display device

Abstract

The invention relates to a method for manufacturing a zinc oxide transparent electrode applied to a flat panel display device, relating to designing, manufacturing and surface modification of the transparent electrode. The manufacturing method is as follows: 1) a transparent substrate (1) for manufacturing the flat panel display device is prepared, 2) methods such as magnetron sputtering or electric arc film forming or ultrasonic spraying film forming are adopted to manufacture a zinc oxide transparent conductive film (2) on the transparent substrate (1), 3) gallium, aluminum, or tin impurities are doped to the zinc oxide transparent conductive film (2) to improve electrical conductivity of a zinc oxide film, as a result, square resistance thereof is less than 50 ohm per square, 4) film growth parameters are controlled, and lattice imperfection of the film is formed by doping, thus obtaining non-crystalline zinc oxide film to improve planeness of the film, the method of doping is used to improve electrical conductivity of the zinc oxide film, the method of superficial treatment is adopted to improve planeness and luminousness of the zinc oxide film. With the traditional tin indium oxide transparent electrode replaced by the zinc oxide transparent electrode of the invention, the manufacturing process is simplified and cost is lowered.

Description

technical field [0001] The invention relates to a structure of a transparent electrode used in a flat panel display device and a preparation method thereof, belonging to the technical field of electronic devices. Background technique [0002] Flat panel display devices have replaced traditional cathode ray tubes as the most important display devices. In flat panel display devices, such as liquid crystal display devices, plasma display devices, and organic light-emitting display devices, etc., transparent electrodes are required so that the displayed images can be received by the observer. Transparent electrodes used in flat panel display devices need to have the characteristics of high conductivity, high flatness and high light transmittance. [0003] Indium tin oxide thin films are usually used as transparent electrodes. Due to the high raw material price of indium tin oxide, the cost of indium tin oxide film is high, thereby affecting the price of flat panel display devi...

AI Technical Summary

Problems solved by technology

Due to the high raw material price of indium tin oxide, the cost of indium tin oxide film is high, which affects the price of flat panel display devices

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