One-dimensional nano single-crystal tubular silicon carbide as well as preparation method and application thereof
A nano-single crystal, silicon carbide technology, applied in chemical instruments and methods, single crystal growth, single crystal growth and other directions, can solve the problems of difficult to remove templates and catalysts, preparation difficulties, hindering applications, etc., to achieve huge application potential, Simple operation and low cost effect
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Embodiment 1
[0038] Such as figure 1 As shown, on the ceramic sheet (i.e. high temperature resistant material) 8, respectively put C as carbon source 60 Powder 10 (99.98% pure) and an area of 5 x 5mm 2 The (100)-oriented monocrystalline silicon wafer 9 is used as a substrate and a silicon source, wherein the monocrystalline silicon wafer is located at C 60 5cm behind the powder. This ceramic chip 8 is put into internal diameter again and be in the ceramic tube (being high temperature resistant inner tube) 7 of 2cm, then ceramic tube 7 is put into internal diameter and be in the ceramic heating tube 3 of 5cm, guarantee that the thermocouple 4 of high temperature furnace 1 ( thermocouple position) and C 60 The powders 10 are located on the same straight line. Then the high-temperature furnace 1 was evacuated for 30 minutes, and then 150 sccm of argon gas was introduced, and the pressure in the furnace reached 50 kPa before heating, and the furnace temperature (temperature at the thermo...
Embodiment 2
[0044] Put commercially available carbon nanopowder (purity 90%) as carbon source on a ceramic sheet (high temperature resistant material) respectively, and area is 10 * 10mm 2 The (110) oriented single crystal silicon wafer was used as the substrate and silicon source, and the single crystal silicon wafer was located 12 cm behind the carbon nanopowder. Then put the ceramic sheet into a ceramic tube (high temperature resistant inner tube) with an inner diameter of 3 cm, and then put the ceramic tube into a ceramic heating tube with an inner diameter of 5 cm to ensure that the thermocouple (thermocouple position) of the high temperature furnace is in contact with the raw material carbon nanometer The powder is on the same straight line. Then the whole system (i.e. high-temperature furnace) was vacuumized for 60 minutes, and then 100 sccm of argon gas was introduced to make the pressure in the furnace reach 5kPa, and then start heating, so that the furnace temperature (temperatu...
Embodiment 3
[0046] Put commercially available carbon micron powder (purity 95%) as carbon source respectively on a ceramic sheet (high temperature resistant material), and the area is 2 * 2mm 2 The (111) oriented single crystal silicon wafer was used as the substrate and the silicon source, and the single crystal silicon wafer was located 3 cm behind the carbon micron powder. Then put the ceramic sheet into a ceramic tube (high temperature resistant inner tube) with an inner diameter of 3 cm, and then put the ceramic tube into a ceramic heating tube with an inner diameter of 5 cm to ensure that the thermocouple (thermocouple position) of the high-temperature furnace is aligned with the raw material carbon micron The powder is on the same straight line. Then the whole system (i.e. high-temperature furnace) was vacuumized for 20 minutes, and then 50 sccm of helium was introduced to make the pressure in the furnace reach 10kPa, and then start heating, so that the temperature of the furnace (...
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