One-dimensional nano single-crystal tubular silicon carbide as well as preparation method
A nano-single crystal and silicon carbide technology, applied in chemical instruments and methods, single crystal growth, single crystal growth, etc., can solve problems such as difficult removal of templates and catalysts, hindering applications, and difficult preparations, achieving huge application potential, The effect of low cost and simple operation
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Embodiment 1
[0038] like figure 1 As shown, the C 60 Powder 10 (99.98% purity) and area 5×5mm 2 The (100) oriented single crystal silicon wafer 9 serves as the substrate and silicon source, wherein the single crystal silicon wafer is located at C 60 5cm behind the powder. Put this ceramic sheet 8 into the ceramic tube (i.e. high temperature resistant inner tube) 7 whose inner diameter is 2cm again, then put the ceramic tube 7 into the ceramic heating tube 3 whose inner diameter is 5cm, to ensure that the thermocouple 4 ( thermocouple position) and C 60 The powders 10 lie on the same line. Then the high-temperature furnace 1 was evacuated for 30 minutes, and then 150sccm of argon was introduced to make the furnace pressure reach 50kPa and then start heating, and the furnace temperature (the temperature at the thermocouple) was heated to 1300 °C and kept for 30 minutes, and then cooled to room temperature (25°C), take out the silicon wafer, and a gray-white substance is formed on the si...
Embodiment 2
[0044] Commercially available carbon nanopowder (90% purity) as a carbon source was placed on a ceramic sheet (high temperature resistant material), and the area was 10 × 10 mm. 2 The (110) oriented single crystal silicon wafer was used as the substrate and the silicon source, wherein the single crystal silicon wafer was located 12 cm behind the carbon nanopowder. Then put the ceramic sheet into a ceramic tube with an inner diameter of 3cm (high temperature resistant inner tube), and then put the ceramic tube into a ceramic heating tube with an inner diameter of 5cm to ensure that the thermocouple (thermocouple position) of the high temperature furnace is connected with the raw carbon nanometer. The powders are on the same line. Then the whole system (ie high temperature furnace) was evacuated for 60 minutes, and then 100sccm of argon was introduced to make the pressure in the furnace reach 5kPa, and then heating was started, and the furnace temperature (the temperature at the...
Embodiment 3
[0046] Commercially available carbon micro-powder (95% purity) as a carbon source was placed on a ceramic sheet (high temperature resistant material), and the area was 2 x 2 mm. 2 The (111) oriented single crystal silicon wafer is used as the substrate and the silicon source, wherein the single crystal silicon wafer is located 3 cm behind the carbon micropowder. Then put the ceramic sheet into a ceramic tube with an inner diameter of 3cm (high temperature resistant inner tube), and then put the ceramic tube into a ceramic heating tube with an inner diameter of 5cm to ensure that the thermocouple (thermocouple position) of the high temperature furnace and the raw material carbon micron The powders are on the same line. Then the whole system (ie high temperature furnace) was evacuated for 20 minutes, then 50sccm of helium was introduced to make the pressure in the furnace reach 10kPa, and then heating was started, and the furnace temperature (the temperature at the thermocouple)...
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Abstract
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