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Silica porous body, laminate and composition for optical use, and method for producing silica porous body

A technology of porous body and silicon dioxide, applied in the directions of silicon dioxide, silicon oxide, coating, etc., can solve the problems of insufficient mechanical strength, and achieve the effect of long validity period, low refractive index, and stable validity period

Active Publication Date: 2010-01-20
MITSUBISHI RAYON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, as described in Patent Documents 2 to 6, most of the existing methods are developed for low dielectric constant materials, and the problem is to solve the problem of resisting chemical mechanical polishing (CMP) (chemical mechanical polishing is used to form copper in semiconductor processes). Dual damascene wiring structure) insufficient mechanical strength

Method used

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  • Silica porous body, laminate and composition for optical use, and method for producing silica porous body
  • Silica porous body, laminate and composition for optical use, and method for producing silica porous body
  • Silica porous body, laminate and composition for optical use, and method for producing silica porous body

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0273] [Composition Blending]

[0274] Mix 19.6g of tetraethoxysilane, 19.2g of methyltriethoxysilane, 9g of ethanol (boiling point 78.3°C), 13.9g of water and 32.9g of 0.3% by weight aqueous hydrochloric acid solution, and stir for 30 minutes in a 63°C water bath , And then stirred at room temperature for 30 minutes to produce a mixture (A).

[0275] Next, 14.9 g of polyethylene oxide-polypropylene oxide-polyethylene oxide triblock polymer (PLURONIC P123 manufactured by BASF Corporation (weight average molecular weight 5,650, ratio of ethylene oxide part is 30 weight %); hereafter referred to as "P123" for convenience) and 12g of ethanol to obtain mixture (B), add the above mixture (A) to mixture (B), stir at room temperature for 60 minutes to prepare mixture (C) .

[0276] 10 ml of this mixture (C) and 9 ml of 1-butanol (boiling point 117.3°C) as a dilution solvent were mixed, and stirred at room temperature for 30 minutes, thereby obtaining a composition.

[0277] In this composi...

Embodiment 2

[0294] Except for using methyltrimethoxysilane instead of methyltriethoxysilane, the same operation as in Example 1 was performed to produce a porous silica body, and each evaluation was performed. The results are shown in Table 1.

Embodiment 3

[0296] Set the ratio of non-ionic polymer to silicon atoms from all alkoxysilanes (tetraethoxysilane and methyltriethoxysilane) to 0.006 (mol / mol). Otherwise, proceed and implement In the same manner as in Example 1, a porous silica body was produced, and each evaluation was performed. The results are shown in Table 1.

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Abstract

Disclosed is a silica porous body which has low refractive index and is stable against water. Specifically disclosed is a silica porous body having a refractive index of not more than 1.3. In this silica porous body, the difference of the refractive indexes before immersion in water and after immersion in water for 24 hours is not more than 0.15 at a wavelength of 550 nm.

Description

Technical field [0001] The present invention relates to a porous silica body, a laminate for optical use using the porous silica body, a composition for producing the porous silica body, and a method for producing the porous silica body. Background technique [0002] Various techniques have been reported on porous silica membranes as low refractive index materials. [0003] As a method of manufacturing a porous silica film, Patent Document 1 discloses a method of obtaining a low refractive index body (silica aerogel) by supercritically drying a silica film with liquid carbon dioxide. This method can provide an extremely low refractive index. [0004] In addition, Patent Documents 2 to 6 disclose a method of forming a silica / organic-hybrid material by coexisting a specific organic substance in a sol-gel reaction of alkoxysilane, and then removing the organic substance to obtain A porous silica body with uniform and regular pores. [0005] Patent Document 1: Japanese Patent Applicatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/12B32B5/18B32B9/00C08K5/5415C08L71/02C08L83/04
CPCC03C17/006C01P2002/72C08L71/02C03C2217/77C08G2650/58C01B33/18C03C2217/425C01B33/12Y10T428/249953
Inventor 船山胜矢大泉淳一山川朋子竹内久雄
Owner MITSUBISHI RAYON CO LTD
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