Preparation method of silicane gas

Abstract

A preparation method of silicane gas relates to a preparation method of electronic gas. The preparation method solves the problems that in the existing technology for preparing silicane gas, catalyticrate is difficult to be controlled, catalytic agent feeding is difficult, recycling difficulty is big, copper silicon contacts have slow productivity and low reactive activity in the preparation process of trialkoxysilanesby, the catalytic agent easily loses effectiveness after meeting water, the products are easily hydrolyzed, and the utilization rate of alcohol is low. The preparation method ofsilicane gas comprises the following steps: 1. preparing trialkoxysilanesby by using silicon powder and alcohol; 2. preparing catalytic controlled release formulations; and 3. using trialkoxysilanesby obtained in the step one to prepare silicane gas by reaction under the action of the catalytic controlled release formulations. The selectivity of trialkoxysilanesby prepared by the method reaches 95% and transformation ratio thereof reaches 90%; in the preparation method, the resolution ratio of the trialkoxysilanesby is 99.8%, silicane productivity is 90-93% and the purity is 99%; and silicanecan be used for preparing noncrystalline silicon thin film solar batteries and used in LED, LCD industries.

Description

technical field [0001] The invention relates to a method for preparing electron gas. Background technique [0002] Silane (SiH 4 ) is an ultra-high-purity electronic gas obtained by purifying silicon metal through a series of physical and chemical reaction processes. It is an extremely important intermediate product in the silicon product industry chain. The main raw materials of devices such as thin film transistors and flat panel displays are the basic raw materials for the information industry and the new energy industry, and play a pivotal role in the industrial chain. [0003] At present, the most advanced silane preparation process in the world is the process of disproportionation of alkoxysilane to prepare silane. However, the catalysts used in the existing process of disproportionation of alkoxysilane to prepare silane are all solid powders, and there are difficulties in catalyst feeding and catalytic rate control. Problems such as difficulty in catalyst recovery, ...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the difficulty of controlling the catalytic rate, the difficulty of catalyst feeding, and the difficulty of recovery in the existing process for preparing silane gas. In the preparation process of the raw material trialkoxysilane used for preparing silane gas, silicon powder and copper-based catalyst Poor contact, low productivity of silicon-copper contacts, low reactivity, easy failure of catalysts in contact with water, easy hydrolysis of products in contact with water, and low utilization of alcohol, the invention provides a method for preparing silane gas

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