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Method for preparing lanthanum nickel oxide ceramic target

A technology of ceramic target and lanthanum nickelate, which is applied in the field of microelectronic material preparation, can solve the problems of ceramic target mixing, reduce the degree of decomposition and prevent decomposition

Inactive Publication Date: 2010-05-26
HENAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the test shows that when the sintering temperature is higher than 1150 °C, the prepared ceramic target has a more obvious mixed phase.

Method used

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  • Method for preparing lanthanum nickel oxide ceramic target
  • Method for preparing lanthanum nickel oxide ceramic target
  • Method for preparing lanthanum nickel oxide ceramic target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] The preparation method of the lanthanum nickelate ceramic target of the present invention comprises the following steps:

[0038] ①. Weigh an appropriate amount of lanthanum nitrate, nickel nitrate, and citric acid, so that the molar ratio is La 3+ : Ni 2+ :(C 6 h 8 o 7 ·H 2 (0)=1:1:5, miscible in 200ml deionized water, stirred with a magnetic stirrer and heated in a constant temperature water bath at 80°C for 2 hours to obtain a green transparent sol, and then place the sol in a constant temperature drying oven at 130°C for 10 hour, light brown xerogel was obtained, which was ground into powder;

[0039]②. Carry out segmental roasting of the dry gel. The segmental roasting process is: room temperature → 200°C for 1.5 hours → 400°C for 3 hours → 750°C for 2 hours → naturally cool down to room temperature. Grinding to obtain black pure phase LNO powder;

[0040] ③, after the LNO powder is ground, add an appropriate amount of adhesive polyvinyl alcohol solution (PV...

Embodiment 2

[0044] The preparation method of the lanthanum nickelate ceramic target of the present invention comprises the following steps:

[0045] ①. Weigh an appropriate amount of lanthanum nitrate, nickel nitrate, and citric acid, so that the molar ratio is La 3+ : Ni 2+ :(C 6 h 8 o 7 ·H 2 (0)=1:1:5.5, miscible in 200ml deionized water, stirred with a magnetic stirrer and heated in a constant temperature water bath at 90°C for 3 hours to obtain a green transparent sol, then place the sol in a constant temperature drying oven at 140°C for 11 hour, light brown xerogel was obtained, which was ground into powder;

[0046] ②. Carry out segmental calcination of the xerogel. The process of segmental calcination is: room temperature → 210°C for 1.6 hours → 410°C for 3.2 hours → 760°C for 2.4 hours → naturally cool down to room temperature. Grinding to obtain black pure phase LNO powder;

[0047] ③, after the LNO powder is ground, add an appropriate amount of adhesive polyvinyl alcohol ...

Embodiment 3

[0051] The preparation method of the lanthanum nickelate ceramic target of the present invention comprises the following steps:

[0052] ①. Weigh an appropriate amount of lanthanum nitrate, nickel nitrate, and citric acid, so that the molar ratio is La 3+ : Ni 2+ :(C 6 h 8 o 7 ·H 2 (0)=1:1:5.5, miscible in 200ml deionized water, stirred with a magnetic stirrer and heated in a constant temperature water bath at 100°C for 4 hours to obtain a green transparent sol, then place the sol in a constant temperature drying oven at 150°C for 12 hour, light brown xerogel was obtained, which was ground into powder;

[0053] ②. Carry out segmental roasting of the xerogel. The segmental roasting process is: room temperature → 230°C for 1.7 hours → 430°C for 3.5 hours → 780°C for 3 hours → naturally cool down to room temperature. Grinding to obtain black pure phase LNO powder;

[0054] ③. After grinding the LNO powder, add an appropriate amount of binder polyvinyl alcohol solution (PVA...

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Abstract

The invention discloses a method for preparing lanthanum nickel oxide (LNO) ceramic target. The method comprises the following steps of preparing LNO gel by the citric acid method, then drying, grinding, cold-pressing, pre-burning and deguming, and sintering and forming the LNO gel to obtain the LNO ceramic target. In the sintering step of LNO ceramic target preparation, the long-time sintering at relatively lower temperature (about 800 DEG C) is adopted, which enables the LNO ceramic target to be preformed, then the short-time sintering at high temperature (950 to 1100 DEG C) is carried out, which can prevent the LNO ceramic target from decomposition; in addition, the short-time sintering at high temperature is carried out in a high-pressure highly pure oxygen environment, so the forward decomposition reaction of LNO is difficult to perform, and decomposition rate of LNO is lowered greatly; furthermore, the LNO film prepared by pulsed laser deposition (PLD) method has good effect.

Description

technical field [0001] The invention relates to a method for preparing a metal oxide ceramic target, in particular to a method for preparing a lanthanum nickelate ceramic target, and belongs to the technical field of microelectronic material preparation. Background technique [0002] Lanthanum nickelate (LaNiO 3 , referred to as LNO) thin film is mainly used for ferroelectric thin film barium strontium titanate (BST) and lead zirconate titanate (PZT) capacitor electrode materials, used in microelectronics and optoelectronics. At present, one of the commonly used methods is to use Pt or Pt-based metal thin films as electrode materials such as Pt / Ti / SiO 2 / Si, but due to the nature of the metal itself, it will cause some problems, resulting in a decrease in device performance, such as: the Pt film and the Si substrate are not tightly bonded; Ti is used as the adhesive layer, and the Pt layer and the Ti layer diffuse each other, resulting in ferroelectric Performance decline;...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/50C04B35/622
Inventor 陈红举张婷丁玲红张伟风
Owner HENAN UNIVERSITY
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