Substrate modification-based method for preparing anisotropic organic field effect transistor

Abstract

The invention discloses a substrate modification-based method for preparing an anisotropic organic field effect transistor. The anisotropic organic field effect transistor is obtained through the primary growth of an insulating medium layer, primary photoetching, primary self-assembling substrate modification by single-layer molecules, primary growth of an organic semiconductor film and primary metal deposition. The method particularly comprises the following steps of: growing the insulating medium layer on an electrically-conductive substrate; spin coating a photoresist protective layer on the surface of the insulating medium layer to obtain an oriented insulating medium layer pattern; selectively assembling a layer of monomolecular film in a region of the insulating medium layer pattern in a chemical vapor transportation mode; growing the organic semiconductor film through deposition; and growing source and drain metal electrodes through deposition by a hollow mask. The substrate modification-based method for preparing the anisotropic organic field effect transistor has the advantages of simple process, high artificial controllability, good repeatability and high uniformity, wherein the anisotropic organic field effect transistor is high in mobility.

Description

technical field [0001] The invention relates to the technical field of microfabrication in organic semiconductors, in particular to a method for preparing anisotropic organic field effect transistors based on substrate modification. Background technique [0002] With the deepening of information technology, electronic products have entered every aspect of people's life and work. In daily life, people's demand for low-cost, flexible, low-weight, and portable electronic products is increasing. Traditional devices and circuits based on inorganic semiconductor materials are difficult to meet these requirements. Therefore, organic microelectronics technology based on semiconductor materials such as organic polymers and organic small molecules that can achieve these characteristics has gained more and more people under this trend. s concern. Improving the mobility of organic field effect transistors and studying the intrinsic properties of organic semiconductors have always been...

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Problems solved by technology

This method has low controllability, poor repeatability, uneven film properties and easy introduction of impurities

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