Complex vacuum deposition device
A technology of equipment and vacuum chamber, applied in the field of composite vacuum deposition equipment, can solve the problems of not realizing the optimal distribution of reaction gas, poisoning of magnetron sputtering source, etc., and achieve the effect of optimizing working range and reducing coating defects
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[0021] The patent of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0022] A new type of composite vacuum deposition equipment, which mainly consists of coating chamber 4, cathodic arc evaporation source 2, intermediate frequency magnetron sputtering source 7, DC magnetron sputtering source 8, gas ion source 10, working gas inlet pipe 6, workpiece Frame 3 and vacuum acquisition system, vacuum measurement system, air intake system, power supply and control system. The suction port 1 is installed on the back side of the vacuum chamber and connected with the vacuum obtaining system. The cathodic arc evaporation source 2 is installed on the vacuum chamber wall on both sides of the suction port 1, the intermediate frequency magnetron sputtering source 7 is installed on the vacuum chamber wall in the middle of the left and right sides, and the DC magnetron sputtering source 8 is installed far away O...
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