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Method and device for measuring axial clearance of confocal lens group

An axial gap and measuring device technology, which is applied to measuring devices, optical devices, instruments, etc., can solve problems such as the inability to achieve high-precision measurement of axial gaps, achieve high stability, improve measurement accuracy, and realize tomography capabilities. Effect

Inactive Publication Date: 2010-07-21
BEIJING INSTITUTE OF TECHNOLOGYGY +1
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Problems solved by technology

However, this method is currently mainly used to measure the small gap between the surface of the object under test and the parallel surface of the transparent part, and it cannot achieve high-precision measurement of the axial gap between multiple lenses in the lens group.
[0011] To sum up, there is no technology so far that can achieve high-precision measurement of the axial clearance in the mirror group after the mirror group is assembled without disassembling the mirror group

Method used

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  • Method and device for measuring axial clearance of confocal lens group
  • Method and device for measuring axial clearance of confocal lens group
  • Method and device for measuring axial clearance of confocal lens group

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Experimental program
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Embodiment 1

[0052] Such as figure 2 , Figure 5 with Figure 7 As shown, the axial gap measurement method of the confocal lens group, the measurement steps are:

[0053] At first, start the measurement software in the main control computer (22), input the design parameters of the measured mirror group (4), including the radius of curvature of each lens in the mirror group, from left to right: r 1 =195.426mm, r 2 =-140.270mm, r 3 =-140.258mm, r 4 =-400.906mm; Refractive index, from left to right: n 0 = 1, n 1 = 1.5143, n 2 = 1, n 3 = 1.668615.

[0054] Then, open the collimated light source (15), and the parallel light that it emits passes through the annular pupil (1) that the light transmission diameter is 6.8mm-9.6mm, passes through the beam splitting system (2), and is the objective lens (3) of 35mm through the top focal length ) converge at the focal point, and form a hollow light cone at the same time, and the light is reflected by the inner lens surface of the measured mi...

Embodiment 2

[0065] Such as image 3 , Figure 5 with Figure 7 As shown, the embodiment one figure 2 The confocal system in (6) is replaced by image 3 The confocal system (6) in can constitute the second embodiment. The difference from Embodiment 1 is that the light enters the confocal system (6) and converges through the lens (11), and the confocal response signal is directly detected by the CCD detector (10) at the focal point of the lens. The remaining measurement methods and devices are the same as those in Example 1.

Embodiment 3

[0067] Such as Figure 4 , Figure 5 with Figure 7 As shown, the embodiment one figure 2 The confocal system in (6) is replaced by Figure 4 The confocal system (6) in can constitute the third embodiment. The difference from Embodiment 1 is that after the light enters the confocal system (6), it is imaged on the surface of the CCD detector (12) through the lens (14) and the microscope objective lens (13), and is detected by the CCD detector (12). focal response signal. The remaining measurement methods and devices are the same as those in Example 1.

[0068] This embodiment realizes the non-contact high-precision measurement of the axial gap in the lens group through a series of measures, and realizes the method and device for measuring the axial gap of the confocal lens group, which has the advantages of no damage to the measured lens group and high measurement accuracy. , Long working distance, easy to use and so on.

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Abstract

The invention belongs to the technical field of optical precision measurement, in particular relates to method and device for measuring an axial clearance of a confocal lens group. The method comprises the following steps of: firstly, carrying out high-precision positioning to the surfaces of various lenses in a lens group by a confocal focusing principle and acquiring the position coordinate of confocal measuring heads at various positioning points; then, sequentially calculating various axial clearances in the lens group by utilizing a ray-tracking recursion formula; and shielding paraxial rays by guiding a circular pupil in a measuring light path to form a hollow measuring optical cone so as to lessen the influence of image errors on a measuring result. The invention carries out non-contact high-precision positioning to the surfaces of the lenses in the lens group by using the confocal optical cone and has the advantages of long working distance, high measuring speed, high measuring precision, avoidance of dismounting the measured lens group in the measuring process, and the like.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and can realize the non-contact high-precision measurement of the axial gap in the mirror group without disassembling the mirror group. technical background [0002] In the field of optics, the measurement of the axial gap in the lens group is of great significance. During the assembly process of high-performance optical systems such as lithography objective lenses and aerospace cameras, it is necessary to precisely adjust the lens axial gap, radial offset and optical axis deflection angle according to the curvature radius and refractive index of the lens in the lens. Taking the objective lens of lithography machine as an example, the axial gap deviation of each single lens will cause spherical aberration, astigmatism, coma, distortion and other aberrations of the lithography objective lens, which will affect the imaging quality of the objective lens. In order to control th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/14
Inventor 赵维谦刘文丽李飞定翔孙若端邱丽荣史立波潘莹莹
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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