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Optical sensor of novel high-output all-semiconductor dust particle counter

A particle counter and optical sensor technology, applied in the field of optical sensors, can solve the problems of short service life of photomultiplier tubes, unfavorable miniaturization of optical sensors, and affecting the signal-to-noise ratio of instruments, so as to increase counting efficiency and particle size resolution, and benefit Test the effect of optimal adjustment and long service life

Inactive Publication Date: 2010-08-04
NANJING UNIV OF SCI & TECH
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Problems solved by technology

But the above-mentioned patent has the following disadvantages: although the photomultiplier tube used has a fast response speed, it is bulky, which is not conducive to the miniaturization of the optical sensor, making it difficult to miniaturize the whole machine; At the same time, the use of photomultiplier tubes requires high-voltage power supply and its own shot noise, which affects the optimization and improvement of the signal-to-noise ratio of the instrument; the low-power lasers used, due to the low-power laser signal amplitude in large flow environments It is easy to miss counting, the signal-to-noise ratio is low, and the counting efficiency is low; after the laser is focused on the photosensitive area, the illumination light is not fully utilized, and the counting efficiency is damaged

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  • Optical sensor of novel high-output all-semiconductor dust particle counter
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  • Optical sensor of novel high-output all-semiconductor dust particle counter

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Embodiment Construction

[0009] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0010] to combine figure 1 , figure 2 It can be seen that the optical sensor of the new large-flow all-semiconductor dust particle counter of the present invention is a right-angle scattering optical system, including an illumination system, a scattered light collection system, an air system and a pre-adjustable amplifier circuit. The illumination system consists of a semiconductor laser 1, an aspheric mirror 2, a first entrance aperture 3, a second entrance aperture 4, an exit aperture 7, and an optical trap 8. The first entrance aperture 3 and the second entrance aperture 4 are placed on In front of the photosensitive area 5, the exit diaphragm 7 is placed behind the photosensitive area 5; the light source 1 adopts a high-power semiconductor laser light source greater than or equal to 100mW, and the divergent beam is emitted two-dimensionally focused by t...

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Abstract

The invention discloses an optical sensor of a novel high-output all-semiconductor dust particle counter. An aspherical mirror, an entrance lens screen, an exit lens screen and a light trapping are arranged in sequence in the heading direction of the light beam sent out by a semiconductor laser light source, a spherical reflector, a lens screen and a photodetector are arranged in the direction perpendicular to the light path, and the photosensitive area and the photosensitive surface of the photodetector are respectively positioned at the two sides of the center of the spherical reflector and satisfy the object-image relationship in the geometrical optics, wherein the light source is a high-power semiconductor laser light source, the photodetector is a photodiode, and a gain adjustable preamplification circuit is arranged on the shell behind the photodetector. The invention improves the counting efficiency, and raises the counting efficiency and the particle size resolution of the instruments. Besides, the invention has the advantages of long service life of the instruments, good exchangeability of the instruments, low power consumption and low cost; moreover, the optical sensor has small size, which is beneficial to the micromation of the complete device.

Description

technical field [0001] The invention belongs to cleanliness detection equipment, in particular to an optical sensor for a full-semiconductor dust particle counter with miniaturization, large flow, high signal-to-noise ratio, high particle size resolution, and high counting efficiency. Background technique [0002] With the continuous improvement of people's requirements for air cleanliness, material purity and processing accuracy, the measurement technology of micro particles is particularly important. The dust particle counter is the main measuring instrument used to measure the particle size distribution by the light scattering counting method. The laser dust particle counter is based on the Mie scattering theory. The scattered light generated by a single particle in the illumination beam is the direct measurement object, and then the measuring instrument is used to distinguish the particle size of the particle to be measured according to the difference in the scattered li...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N15/14
Inventor 王春勇闫振纲卞保民严伟
Owner NANJING UNIV OF SCI & TECH
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