Broad-spectrum wide angle absorption solar cell moth-eye antireflection structure and preparation method thereof

Abstract

The invention relates to a broad-spectrum wide angle absorption solar cell moth-eye antireflection structure based on a monocrystalline silica substrate and a preparation method thereof, which is characterized by having the aid of the bionics principle, taking a moth-eye micro-nano structure as an antireflection layer and improving optical energy capture; the micro-nano structure is formed by taking dense monolayer silicon or a silicide particle network formed by a drawing-film (LM) method as a reticle mask; forming the micro-nano structure by adopting the dry etching process to etch monocrystalline silicon, thus preventing the defect of insufficient etching depth limit of a wet etching method; adjusting the size and density of reticle mask particles to regulate the optical refraction coefficient gradient of the adjusting moth-eye micro-nano structure so as to realize wide-angle absorption of wide incident light with 0-60 degrees; adopting the method for adjusting the size (20-800 NM), depth and periodicity of the micro-nano structure to realize optical energy absorption of infrared, visible and ultraviolet (250-2.5 NM) broadband section, thereby increasing cell efficiency.

Description

technical field [0001] The invention relates to a wide-spectrum and wide-angle absorbing solar cell moth-eye anti-reflection structure and a manufacturing method thereof, belonging to solar cells and their applications. Background technique [0002] Solar energy has attracted widespread attention from governments, enterprises and research institutions around the world for its cleanness and sustainability. In the past ten years, the photovoltaic industry has maintained strong growth, with an average growth rate of 40%. This growth rate is expected to remain at 25-40% for the next ten years. This will undoubtedly contribute to reducing the world's dependence on fossil fuels and reducing the CO associated with thermal power generation. 2 emissions are of great benefit. Currently, solar cells based on crystalline silicon dominate the photovoltaic market with a market share of more than 90%. However, the efficiency of monocrystalline silicon-based cells in the domestic mainst...

AI Technical Summary

Problems solved by technology

[0005] In terms of foreign patent search, I found the US patent method of fabrication of diamondmoth-eye surface (US005334342A), which mainly uses microlithography technology to grow moth-eye structure diamond films, which is relatively expensive.

Images