Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof

A nerve activity, probe electrode technology, applied in the fields of neurobiology, materials science and microelectronics, can solve the problem that flexible electrodes cannot meet the implantation hardness and other problems, so as to ensure long-term stability, reduce tissue damage, and improve tissue Injury and the effect of electrode instability in long-term recording of electrical signals

Inactive Publication Date: 2010-11-17
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the main purpose of the present invention is to provide a flexible probe electrode and its implantation tool for recording nerve activity electrical signals, so as to ensure the long-term stability of the electrode work and solve the problem that the hardness of the flexible electrode itself cannot meet the implantation hardness. The problem

Method used

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  • Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof
  • Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof
  • Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof

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Embodiment 1

[0031] The preparation method of the flexible probe-type electrode based on the polymer substrate of the present invention is further described below in conjunction with the accompanying drawings by taking polyimide polymer as an example

[0032] 1. Soak the silicon wafer 1 in a mixture of concentrated sulfuric acid and hydrogen peroxide (5:1), boil it, rinse it with a large amount of deionized water, blow dry, and dry it in a 250° oven to remove the surface moisture of the silicon wafer. Evaporate 300nm thick aluminum metal 2 as a sacrificial layer, (eg figure 1 (a) shown).

[0033] 2. Spin-coat polyimide photoresist 3, pre-baked to form the underlying polyimide film, photoetch the electrode morphology, and finally cure with a stepwise heating method to obtain a polyimide film with a thickness of about 5 microns. Amine films are used as the underlying insulating material for microelectrodes, (eg figure 1 (b) shown).

[0034] 3. A patterned titanium-gold metal film 4 is for...

Embodiment 2

[0038]The method of making the carrier will be further described by taking silicon material as an example in conjunction with the accompanying drawings.

[0039] 1, prepare SOI substrate 7 and clean, (as Figure 4 (a) shown).

[0040] 2. Spin-coat the photoresist, photoetch the topography of the carrier 11 after pre-baking, (such as Figure 4 (b) shown).

[0041] 3. Etch the SiO in the SOI substrate 7 with HF 2 Layer 6, the carrier 11 is released, (as Figure 4 (c) shown).

Embodiment 3

[0043] The method of penetrating the flexible probe electrode into the biological tissue with the help of the implant tool will be further described below in conjunction with the accompanying drawings.

[0044] 1. Coat the hot-melt PEG on the carrier 11, clamp the flexible probe electrode 10 with tweezers 9, put it on the carrier 11, then cool it, and the PEG is solidified. At this time, the carrier 11, the electrode 10 and the solid PEG 8 form a rigid whole, (such as Image 6 shown).

[0045] 2. Use tweezers 9 to pierce the probe electrode 10 into the position to be recorded in the biological tissue 12, and the solid PEG 8 will be dissolved in body fluid, (such as Figure 7 shown).

[0046] 3. Pull out the carrier 11 from the body with tweezers 9, leaving only the flexible probe electrode 10 in the body 12, (such as Figure 8 shown).

[0047] Using this method has the advantages of easy and precise penetration into the recording position, no tissue damage, and good reliab...

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PUM

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Abstract

The invention discloses a flexible probe electrode used for recording an electric signal of a neural activity. The flexible probe electrode comprises a flexible substrate, electrode sites, metal wires, lead welding spots and flexible insulating layers, wherein both the electrode sites and the metal wire are arranged on the flexible substrate; each electrode site is connected to a corresponding lead welding spot through led metal wires; and the flexible insulating layers are arranged on the surfaces of the metal wires instead of being arranged at the electrode sites and the metal welding spots. The invention also discloses an implanting tool for inserting the flexible probe electrode into tissues. Through the implanting tool, the electrode has a high flexibility and biocompatibility and the tissue damage is reduced, so that the long-term working stability of the electrode is ensured, the problem that the own hardness of the flexible electrode cannot satisfy an inserted hardness is solved and the defects that the conventional probe electrodes can damage the tissues easily and the electric signal is instable for the long-term recording of the electrode are overcome.

Description

technical field [0001] The invention relates to the technical fields of neurobiology, material science and microelectronics, in particular to a flexible probe electrode for recording nerve activity electrical signals and an implant tool for piercing the flexible probe electrode into tissue. Background technique [0002] Electrodes, as a key device for extracting electrophysiological activity signals, are used to perform functional electrical stimulation on biological tissues or record biological activity electrical signals. In many cases, electrodes need to be inserted into biological tissues to achieve the purpose of recording. The electrodes currently used to record electrical signals of nerve activity are based on materials with certain strength such as silicon, metal or glass. The electrodes of these materials can be easily penetrated into biological tissues due to their good strength and hardness and ensure Accuracy of penetration position. However, electrodes with hig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/04A61B17/00
Inventor 陈弘达李晓倩裴为华郭凯王宇
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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