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Method and device for recycling silicon tetrachloride

A technology of silicon tetrachloride and silicon dioxide powder, applied in chemical instruments and methods, silicon halide compounds, halosilanes, etc., can solve the problem of ineffective recycling of reaction heat, large consumption of fresh water, and large amounts of heat energy and other issues, to achieve the effect of small investment, realization of recycling, and large processing capacity

Inactive Publication Date: 2011-01-12
HEBEI UNIVERSITY OF SCIENCE AND TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Compared with gas-phase method and thermal hydrogenation method, this process has the advantages of simple process and large silicon tetrachloride treatment capacity, but the fresh water consumption of this process is large, and the heat of reaction cannot be effectively recycled; and due to the generated carbon dioxide Silica colloids have a high water content, and drying them requires a lot of heat, so energy consumption is high

Method used

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  • Method and device for recycling silicon tetrachloride
  • Method and device for recycling silicon tetrachloride

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0065] Select silicon dioxide powder with a particle size range of 80-150 μm, and feed it into the gas-solid fluidized bed reactor through the fluidized medium feed port 9 as the initial fluidized medium. The amount of silicon dioxide powder added is 1 / 2 of the volume of the straight cylinder of the gas-solid fluidized bed reactor.

[0066] The 0.6MPa steam from the boiler is decompressed to 0.1MPa, and the flow is controlled by the steam flow meter to meet the requirements of the feed amount and feed ratio. The water vapor enters the gas-solid fluidized bed reactor evenly distributed through the steam inlet 2 and the steam gas distributor 3 at the bottom of the gas-solid fluidized bed reactor.

[0067] The liquid silicon tetrachloride from the silicon tetrachloride storage tank is pressurized to 0.1MPa through a pump, and the flow is controlled by a flow meter so that the feed ratio of water vapor and silicon tetrachloride is 3.0:1.0, and the gas-solid fluidized bed reaction ...

Embodiment 2

[0072] Select silicon dioxide powder with a particle size of 80-150 μm, and enter the gas-solid fluidized bed reactor through the fluidization medium feed port 9 as the initial fluidization medium. The amount of silicon dioxide powder added is 1 / 2 of the volume of the straight cylinder of the gas-solid fluidized bed reactor.

[0073] The 1.5MPa water vapor by-produced from the tubular heat exchange tube 6 in the gas-solid fluidized bed reactor is decompressed to 0.6MPa, and the flow rate is controlled by a steam flow meter to meet the requirements of the feed amount and feed ratio. The water vapor enters the gas-solid fluidized bed reactor evenly distributed through the steam inlet 2 and the steam gas distributor 3 at the bottom of the gas-solid fluidized bed reactor.

[0074] After the liquid silicon tetrachloride from the silicon tetrachloride storage tank is pressurized to 0.5MPa by a pump, the flow is controlled by a flow meter so that the feed ratio of water vapor and sil...

Embodiment 3

[0079] Select silicon dioxide powder with a particle size of 120-200 μm, and feed it into the gas-solid fluidized bed reactor through the feeding port 6 as the initial fluidized medium. The amount of silicon dioxide powder added is 1 / 2 of the volume of the straight cylinder of the gas-solid fluidized bed reactor.

[0080] The water vapor by-produced from the tubular heat exchange tube 6 in the gas-solid fluidized bed reactor is decompressed to 0.3 MPa, and the flow is controlled by a steam flow meter to meet the requirements of the feed amount and feed ratio. The water vapor enters the gas-solid fluidized bed reactor evenly distributed through the steam inlet 2 and the steam gas distributor 3 at the bottom of the gas-solid fluidized bed reactor.

[0081] The liquid silicon tetrachloride from the silicon tetrachloride storage tank is pressurized to 0.3MPa through a pump, and the flow is controlled by a flow meter so that the feed ratio of water vapor and silicon tetrachloride i...

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Abstract

The invention relates to a method and a device for recycling silicon tetrachloride, which are characterized in that preheated silicon tetrachloride and water vapor are continuously and steadily loaded into a reactor to react according to a molar ratio of 2.0-5.0:1.0 so as to generate hydrogen chloride gas and silicon dioxide powder. The hydrogen chloride gas is recycled after being dried, and the silicon dioxide powder can be used as a product for sale after being treated in a subsequent handling. The device for recycling the silicon tetrachloride is a gas-solid fluidized bed reactor and comprises a fluidized bed cylinder, a water vapor gas inlet, a water vapor gas distributor, a silicon tetrachloride gas distributor, a tubular type heat exchange tube, a cyclone separator, a silicon dioxide powder discharge port and the like. The method and the device have the advantages of short process flow, low energy consumption, less equipment investment, easily controlled operation and the like.

Description

technical field [0001] The invention belongs to the technical field of chemical technology and equipment, and relates to a method and a device for recycling silicon tetrachloride, a by-product in the production process of trichlorosilane. Background technique [0002] Polysilicon is the most basic functional material in the semiconductor industry, electronic information industry, and solar photovoltaic cell industry. In recent years, with the large-scale development and utilization of solar energy, the use of polysilicon has become more and more extensive, and the amount of polysilicon used has also increased. my country's polysilicon industry has shown a trend of geometric progression. At present, the scale of polysilicon under construction and has been built in my country reaches 90,000 tons per year, and these devices mainly use improved Siemens method technology. The reaction principle is: trichlorosilane and hydrogen undergo oxidation-reduction reaction at high tempera...

Claims

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Application Information

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IPC IPC(8): B01J8/24C01B33/107
Inventor 胡永其王建英张向京刘润静赵风云刘玉敏
Owner HEBEI UNIVERSITY OF SCIENCE AND TECHNOLOGY
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