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Fourier transform chip spectrometer based on integrated light technique

A technology of Fourier transform and spectrometer, which is applied in the field of Fourier transform spectrometer, can solve problems that have not yet been discovered, and achieve the effect of simple and novel structure, low cost and high resolution

Active Publication Date: 2011-10-05
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0007] From the current published literature, no method and device similar to the Fourier transform chip spectrometer based on integrated light technology proposed by the present invention have been found

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  • Fourier transform chip spectrometer based on integrated light technique
  • Fourier transform chip spectrometer based on integrated light technique
  • Fourier transform chip spectrometer based on integrated light technique

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Embodiment Construction

[0034] The working wavelength range of the Fourier transform chip spectrometer based on the integrated optical technology of the present invention is jointly determined by the optical transparency of the integrated optical waveguide chip and the detectable wavelength range of the photoelectric detector. Among them, the optical transparency of integrated optical waveguide chips with electro-optic modulation effect is generally good (such as LiNbO 3 The transmission wavelength range of the crystal is 0.4μm~5μm, LiTaO 3 The transmission wavelength range of the crystal is 0.45μm~5μm), so the type of photodetector determines the working wavelength range of the chip spectrometer. For example, the sensitive range of Si photodetector is 0.4μm~1.1μm, and the sensitive range of InGaAs photodetector 0.8 μm to 1.7 μm and so on. In order to broaden the detection interval of the spectrometer, such as image 3 As shown, we prepared multiple sensitive windows, multiple sensitive optical wav...

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Abstract

The invention discloses a Fourier transform chip spectrometer based on integrated light technique, comprising an integrated optical waveguide chip having electro-optic modulation function. Light from a light source enters the integrated optical waveguide chip through a fiber transmission coupler, and waveguide light from the chip enters an optical waveguide interferometer through a sensitive window interval. The interferometer outputs signals to a photoelectric detector. A voltage function generator is used for applying voltages varying with time between two modulated electrodes of the optical waveguide interferometer, the photoelectric detector is used for real-time measuring the change of the signal strength of the interferometer varying with the modulated voltage, and a signal processing chip connected with the photoelectric detector and the voltage function generator at same time is used for rapidly processing Fourier transform on the signals of the interferometer to obtain an incident light spectrum. The Fourier transform chip spectrometer provided by the invention can determine visible-infrared light absorbing spectra of solids, liquid, even monomolecular adsorption layers in the sensitive window, and determine fluorescence spectra of fluorescent substances in the sensitive window, with the advantages of strong anti-interference capability, and is suitable for rapid on-site quantitative determination.

Description

technical field [0001] The invention belongs to the field of Micro-Opto-Electro-Mechanical System (MOEMS) processing technology, integrated optical waveguide sensing technology and spectral measurement technology, relates to a Fourier transform spectrometer based on integrated optical waveguide technology, in particular to an evanescent wave surface sensitive element A novel on-chip spectrometer integrated on the same chip as a Fourier transform optical waveguide spectrometer. Background technique [0002] The spectrometer is a powerful tool for analyzing the composition, structure and content of substances. It has a wide range of applications in many fields such as atmospheric monitoring, water environment monitoring, food safety testing, product quality testing, chemical defense and anti-terrorism, biomedicine, petrochemicals, space exploration, and material research and development. application. Different from the large-scale spectral analysis equipment in existing labor...

Claims

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Application Information

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IPC IPC(8): G01N21/45G01N21/31G01N21/64G02B6/12
Inventor 祁志美陈方
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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