A manufacturing process of a microfluidic channel with heating function

A microfluidic channel and manufacturing process technology, applied in the field of micro-nano, can solve problems such as uncontrollable ultrasonic energy, harmful noise sources of devices, and failure to meet requirements, etc., and achieve good biocompatibility, chemical analysis auxiliary functions, and strong operability , promote the effect of thorough mixing and analysis

Active Publication Date: 2011-12-14
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Commonly used methods are: ultrasonic vibration, which uses the mechanical energy of polar fluid molecules to convert into heat energy; but this method has two main fatal flaws: on the one hand, the ultrasonic energy is uncontrollable, on the other hand, the frequency is too high. device causing a harmful source of noise
However, the metal heating resistors obtained in this way are on the micron scale. If the scale of the micro-channel is smaller and more precise, this metal heating resistor cannot meet the requirements.

Method used

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  • A manufacturing process of a microfluidic channel with heating function
  • A manufacturing process of a microfluidic channel with heating function
  • A manufacturing process of a microfluidic channel with heating function

Examples

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Embodiment 1

[0032] Embodiment 1-Preparation of nano wire structure by wet etching

[0033] A manufacturing process of a microfluidic channel with a heating function, comprising the following steps:

[0034] 1) Put the transparent quartz glass substrate 1 in concentrated H with a volume ratio of 7:3 2 SO 4 and H 2 o 2 The mixture was placed in a water bath at 90°C for 30 minutes, washed with acetone and IPA first, ultrasonicated at 45°C for 15 minutes with acetone, 15 minutes with IPA at room temperature, then washed with deionized water for 10 minutes, and then dried at 150°C or higher.

[0035] 2) Prepare a layer of SU-8 photoresist 2 on the surface of the transparent quartz glass substrate 1 by spraying or spin coating, the thickness of the SU-8 photoresist 2 is 1-100um, and then pre-baking, at 65 Bake at -95°C for 10 minutes,

[0036] 3) Refer to Picture 1-1 , 365nm ultraviolet exposure 4 was carried out on the transparent quartz glass substrate prepared with SU-8 photoresist, a...

Embodiment 2

[0039] Embodiment 2-Using Lift-off to prepare nano wire structure

[0040] A manufacturing process of a microfluidic channel with a heating function, comprising the following steps:

[0041] 1) Put the transparent quartz glass substrate 1 in concentrated H with a volume ratio of 7:3 2 SO 4 and H 2 o 2 The mixture was placed in a water bath at 90°C for 30 minutes, washed with acetone and IPA first, ultrasonicated at 45°C for 15 minutes with acetone, 15 minutes with IPA at room temperature, washed with deionized water for 10 minutes, dried with nitrogen, and then dried at 150°C or higher.

[0042] 2) Prepare a layer of SU-8 photoresist 2 on the surface of the transparent quartz glass substrate 1 by spraying or spin coating, the thickness of the SU-8 photoresist 2 is 1-100um, and then pre-baking, at 65 Bake at -95°C for 10 minutes,

[0043] 3) Refer to Figure 1-2 , the transparent quartz glass substrate 1 prepared with SU-8 photoresist 2 is subjected to 365nm ultraviolet lig...

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Abstract

The invention discloses a manufacturing process of a microfluid channel with a heating function, which comprises the following steps of: firstly cleaning a transparent quartz glass substrate; preparing a layer of SU-8 photoresist on the surface of the substrate; performing ultraviolet exposure, wherein a mask plate pattern adopted in the ultraviolet exposure is a pattern of a microfluid channel structure; then preparing a nano metal wire structure, wherein the preparation methods include wet corrosion and Lift-off; and finally soaking with a SU-8 standard developing solution by taking the prepared nano metal wire as a shelter to remove the unexposed area and form a microfluid channel and a suspended nano metal wire at the same time. When the nano metal wire is prepared, the microfluid channel is obtained at the same time; the nano metal wire is processed and formed by use of an electron beam direct writing process; and the microfluid channel has a smaller and more precise dimension, and can be used as a support of a nano metal lead.

Description

technical field [0001] The invention belongs to a manufacturing process of a microfluidic channel in the micro-nano field, and in particular relates to a manufacturing process of a microfluidic channel with a heating function. technical background [0002] At present, with the innovation and application of MEMS products, the research and development of DNA biochips and lab-on-chips, higher requirements are put forward for the driving, mixing and heating devices of microfluidics. In order to drive the fluid in the microchannel to achieve faster flow and sufficient mixing, it is usually necessary to heat the microchannel device. Commonly used methods are: ultrasonic vibration, which uses the mechanical energy of polar fluid molecules to convert into heat energy; but this method has two main fatal flaws: on the one hand, the ultrasonic energy is uncontrollable, on the other hand, the frequency is too high. device causing a harmful source of noise. In addition, MEMS microfluid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 邵金友丁玉成刘红忠黎相孟
Owner XI AN JIAOTONG UNIV
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