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Preparation method of (103) oriented yttrium-barium-copper-oxide (YBa2Cu3O7-delta, YBCO) high-temperature superconductive film

A high-temperature superconducting thin film, yttrium-barium-copper-oxygen technology, which is applied in the usage of superconducting elements, superconducting devices, superconducting/high-conducting conductors, etc., can solve problems such as poor superconducting performance, rough surface of the film, and difficult costs , to achieve the effect of good crystallinity and smooth film surface

Inactive Publication Date: 2014-05-28
湖南省方正达电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the natural cleavage plane of SrTiO3 or MgO single crystal substrate is (100), the preparation of (110) oriented SrTiO 3 Or MgO single crystal substrates are more difficult and costly; in addition, in (110) orientation SrTiO 3 Or the YBCO film prepared on the MgO single crystal substrate will induce the film to grow in two directions (103) and (103), the surface of the film is relatively rough, and the superconducting property is also poor.

Method used

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  • Preparation method of (103) oriented yttrium-barium-copper-oxide (YBa2Cu3O7-delta, YBCO) high-temperature superconductive film

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preparation example Construction

[0027] The invention discloses a preparation method of a (103) oriented yttrium barium copper oxide high temperature superconducting film, comprising:

[0028] The (100) oriented MgO single crystal substrate is placed on the sample stage of the growth chamber of the vacuum deposition device;

[0029] Take YBa 2 Cu 3 o 7-δ As the target material, the vacuum degree of the growth chamber was pumped to 10 -3 ~10 -6 Between Pa, the working gas oxygen is introduced into the growth chamber to a pressure of 2-10Pa, the temperature of the sample stage is heated to the range of 800-850°C, and the (100)-oriented MgO single crystal substrate is deposited and grown on the (100)-oriented MgO single crystal substrate. (103) oriented yttrium barium copper oxide high temperature superconducting thin film.

[0030] According to the present invention, after the epitaxially grown yttrium barium copper oxide high temperature superconducting thin film is deposited on the (100) oriented MgO sin...

Embodiment 1

[0039] Fix the cleaned (100) oriented MgO single crystal substrate on the heating platform of the PLD growth chamber, and fix the YBCO target on the target position;

[0040] Adjust the position of the (100) oriented MgO single crystal substrate and the target so that the distance between the target and the target is 4.5 cm, and the incident direction of the laser light is at an angle of 45° to the normal direction of the target surface;

[0041] Vacuum the PLD growth chamber so that the vacuum degree of the growth chamber is 6.0×10 -4 Pa;

[0042] Heat the substrate to 600°C at a rate of 20°C / min, then heat to 810°C at a rate of 10°C / min, feed in the working gas oxygen, adjust the intake valve and exhaust valve to keep the pressure in the vacuum chamber at 5Pa ;

[0043] Adjust the pulsed laser so that the laser energy density is 2J / cm 2 , with a frequency of 2 Hz, depositing an epitaxially grown yttrium-barium-copper-oxygen high-temperature superconducting thin film on th...

Embodiment 2

[0048] Fix the cleaned (100) oriented MgO single crystal substrate on the heating platform of the PLD growth chamber, and fix the YBCO target on the target position;

[0049] Adjust the position of the (100) oriented MgO single crystal substrate and the target so that the distance between the target and the target is 4.5 cm, and the incident direction of the laser light is at an angle of 45° to the normal direction of the target surface;

[0050] Vacuum the PLD growth chamber so that the vacuum degree of the growth chamber is 6.0×10 -4 Pa;

[0051] Heat the substrate to 600°C at a rate of 20°C / min, then heat to 830°C at a rate of 10°C / min, feed in the working gas oxygen, adjust the intake valve and exhaust valve to keep the pressure in the vacuum chamber at 5Pa ;

[0052] Adjust the pulsed laser so that the laser energy density is 2J / cm 2 , the frequency is 2 Hz, and the epitaxially grown yttrium barium copper oxide high temperature superconducting film is deposited on the ...

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Abstract

The embodiment of the invention discloses a preparation method of a (103) oriented yttrium-barium-copper-oxide (YBa2Cu3O7-delta, YBCO) high-temperature superconductive film. The method comprises the following steps of: adopting the YBCO as a target, utilizing a vacuum deposition device to deposit an epitaxial-growth YBCO superconductive film on a (100) oriented Mgo monocrystal substrate under the temperature 800-850 DEG C. Under the condition, two (103) oriented YBCO crystal lattices and three (100) oriented Mgo monocrystal substrates have closer crystal lattice matching relation, therefore, the direct in-situ epitaxial growth of the (103) oriented YBCO high-temperature superconductive film on the (100) oriented Mgo monocrystal substrate is realized. The experimental result shows that the YBCO high-temperature superconductive film prepared by the method has the advantages that the (103) preferential direction is good, the surface of the film is smooth, the crystallinity is good and the temperature changed by superconductive critical is about 90K.

Description

technical field [0001] The invention relates to the technical field of high-temperature superconductivity, and more specifically relates to a method for preparing a (103)-oriented yttrium-barium-copper-oxygen high-temperature superconducting thin film. Background technique [0002] The chemical formula of yttrium barium copper oxide superconductor (YBCO) is YBa 2 Cu 3 o 7-δ , is a high-temperature superconductor material with a superconducting critical transition temperature of about 90K. YBCO superconducting phase is similar to ABO 3 Type of distorted perovskite structure, but due to the absence of oxygen atoms, its crystal structure has orthogonal characteristics, belonging to the second type of superconductor. The room temperature lattice constant of YBCO high temperature superconducting material is about a=0.38227nm, b=0.38872nm and c=1.1680nm. [0003] There are many ways to prepare YBCO thin films. Generally, vacuum deposition technology is used to carry out epita...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B23/02C30B23/06C30B29/22H01B12/06C04B35/45
CPCY02E40/642Y02E40/60
Inventor 苏晓东
Owner 湖南省方正达电子科技有限公司