Coupling waveguide, manufacture method thereof and semiconductor photoelectronic device applying coupling waveguide

Abstract

The invention discloses a coupling waveguide, a manufacture method thereof and a semiconductor photoelectronic device applying the coupling waveguide. The coupling waveguide comprises a substrate, a lower waveguide cladding, a first waveguide core layer, an isolating layer, a second waveguide core layer and an upper waveguide cladding, wherein the second waveguide core layer is provided with a width transition section of which the transverse width is gradually changed along a light guide direction. The manufacture method of the coupling waveguide comprises the following steps of: S1. carrying out primary epitaxy for growing the lower waveguide cladding, the first waveguide core layer, the isolating layer and the second waveguide core layer in order; S2. processing the second waveguide core layer to form the width transition section; and S3. carrying out secondary epitaxy for forming the upper waveguide cladding. The semiconductor photoelectronic device comprises an electroabsorption modulator or a photodetector; and the transverse widths of the corresponding parts of the second waveguide core layer of the coupling waveguide and the electroabsorption modulator or the photodetector are gradually narrowed along the light guide direction. The distribution of all transverse light fields of the coupling waveguide can be adjusted according to the requirement, and thereby the distribution of a light limiting factor of the device is optimized.

Description

Technical field [0001] The invention relates to the technical field of optoelectronic devices, in particular to a coupling waveguide, a manufacturing method thereof, and a semiconductor optoelectronic device using the same. Background technique [0002] Microwave links have important applications in communications, signal processing, and radar. However, with the increase of microwave frequency, the loss of microwave radio frequency signals in cables and waveguides increases rapidly, especially in the millimeter wave band. [0003] Microwave fiber links use microwave signals to modulate light intensity, and transmit or distribute them to optical receivers through optical fibers, and restore microwave signals through optical receivers. From both ends of the link, the microwave optical fiber link is completely equivalent to the microwave link, and because the optical loss of the optical fiber is very small, the transmission distance of high-frequency microwave signals is greatly incr...

AI Technical Summary

Problems solved by technology

At the back end of the waveguide, due to the effect of light absorption, the optical density of the active area is much smaller than that of the input end, resulting in very weak light absorption at the back end of the waveguide, which is not conducive to realizing a small driving voltage.

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