Method for preparing nano-gap electrodes on surface of nano-pore and in nano-pore

Abstract

The invention relates to a method for preparing nano-gap electrodes on the surface of a nano-pore and in the nano-pore. The method enables two-dimensional two-channel simultaneous detection of signal changes in a molecular through hole to be realized and accuracy of sequencing of a nano-pore to be improved. The method for preparing a nano-gap electrode on the surface of a nano-pore comprises the following steps: forming a micron-sized metal line on the surface of a substrate, etching the micron-sized metal line into a metal line with line width at a nanometer level, etching a through nano-pore in the substrate at a position corresponding to the nanometer metal line, and cutting the metal line through corrosion so as to directly form a surface nano-gap electrode at the opening of the nano-pore. To improve the invention, a micron-sized metal line is formed on the surface of the substrate and etched until the line width of the metal line is 10 to 50 nm, then etching is carried out on themetal line so as to form opposite electrodes, a through nano-pore is etched in the substrate at a position corresponding to a nano-gap, the metal line is allowed to grow towards the edge of the nano-pore, and therefore, a surface nano-gap electrode is formed at the opening of the nano-pore.

Description

technical field [0001] The invention relates to a method for preparing nano-gap electrodes on the surface of nano-holes and inside the holes. Background technique [0002] Nanopores are used in the detection of biomolecules through electrophoresis to drive a biomolecule through a small hole with a diameter of several nanometers. In 1996, Kasianowicz and his colleagues reported for the first time that single-stranded DNA or RNA passed through the α-hemolysin nanopore self-assembled on the lipid bilayer under the action of an electric field, and changed the conductance of the nanopore when the DNA molecule passed through the pore, The current changes, resulting in the phenomenon of blocking current (blockade current). Since different bases have different atomic compositions, they will generate different blocking currents when passing through the nanopore. According to the detectable signal, four different bases A, T, C, and G can be distinguished. Thereby obtained the sequen...

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Problems solved by technology

[0004] However, due to the limitations of the stability and insulation of the current preparation materials, processing technology, and nano-engraving technology, the length of the current solid-state nanopore cannot reach the length of a single nucleotide (<0.4nm), so a chain passing through the nanometer During the pore process, multiple nucleotides will be blocked in the pore at the same time to cause changes in the current. Due to these factors, it is temporarily impossible to simply rely on the detection of changes in the longitudinal blocking current to achieve single-base sequencing of DNA.

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