Vitreous silica crucible

A technology of glass crucible and silicon oxide, which is applied in glass forming, glass manufacturing equipment, chemical instruments and methods, etc., and can solve problems such as instability

Active Publication Date: 2012-06-06
SUMCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, crystal pulling is not stable until the seed crystal contacted with the silicon melt grows to form a shoulder of single crystal silicon, so the crystal pulling is easily affected by the vibration of the melt surface

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0102] Examples related to the present invention are described below. First, cut out an actual vitreous silica crucible such as Figure 5 Samples of the shape shown. The sampling sites of each sample were figure 1 W2, W1, RW, R, BR, B sites shown. Here, parts W2 and W1 are the upper end and center of the cylindrical straight body, RW is the upper end of the corner, R is the middle part of the corner, BR is the boundary between the corner and the bottom, and B is the center of the bottom. In addition, in each graph showing the results, the sample of the transparent layer is represented by T, the sample of the bubble-containing layer is represented by F, and the double-layered sample of the transparent layer and the bubble-containing layer is represented by T+F. Regarding each of these samples, the volume expansion rate, specific gravity decrease, air bubble content rate, and the like were measured.

[0103] First, the volume expansion ratios of samples T, F, and T+F were m...

Embodiment 2

[0115]A vitreous silica crucible A of the present invention and a conventional vitreous silica crucible B (diameter 24 inches; 61 cm) were prepared. The thicknesses of the transparent layer and bubble-containing layer of vitreous silica crucibles A and B are shown in Table 1, respectively. The air bubble content of the transparent layer is about 0.005% at the center of the bottom, about 0.1% at the boundary between the bottom and the corner, and about 0.05% from the middle portion between the upper end and the lower end of the straight barrel to the upper end. The average diameter of the bubbles in the transparent layer was about 80 μm. In addition, the bubble content of the bubble-containing layer was about 0.5%, and the average diameter of the bubbles was about 150 μm.

[0116] 【Table 1】

[0117]

[0118] Then, for the vitreous silica crucible A and the vitreous silica crucible B, the parts W1, R, and B (refer to figure 1 ) volume expansion rate. The measurement resu...

Embodiment 3

[0120] Vitreous silica crucibles 1 to 5 having a transparent layer and a bubble-containing layer having the thickness shown in Table 2 were produced. The vitreous silica crucibles 3 and 5 correspond to the vitreous silica A and B of Example 2, respectively. The bubble content ratios of the transparent layer and the bubble-containing layer were the same as in Example 2. Using these vitreous silica crucibles, silicon single crystals were pulled, and the crystallinity of the obtained single crystals was evaluated. Crystallinity was evaluated based on the value (single crystal ratio) of (mass of straight cylindrical portion of single crystal silicon) / (mass of polycrystalline silicon filled in the crucible immediately before pulling). The results are shown in Table 2. The evaluation criteria in Table 2 are as follows.

[0121] ◎: Single crystal ratio 0.80 to less than 0.99

[0122] ○: Single crystal ratio 0.70 to less than 0.80

[0123] △: Single crystal ratio 0.60 to less tha...

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Abstract

Provided is a vitreous silica crucible which is resistant to deformation and corrosion even when heated at high temperature for a long time. There is provided a vitreous silica crucible of the present invention including a substantially cylindrical straight body portion, a curved bottom portion, and a corner portion smoothly connecting the straight body portion and the bottom portion, wherein a wall of the vitreous silica crucible includes, from an inner surface side, a transparent layer and a bubble-containing layer, and a ratio of a thickness of the bubble-containing layer with respect to a thickness of the transparent layer at an intermediate position between an upper end and a lower end of the straight body portion is 0.7 to 1.4.

Description

technical field [0001] The present invention relates to a vitreous silica crucible suitable for the production of single crystal silicon, and specifically relates to a vitreous silica crucible capable of suppressing deformation caused by heating. Background technique [0002] Semiconductor single crystal silicon is generally produced by the Czochralski method (CZ method) of pulling a single crystal from a silicon melt obtained by heating and melting polycrystalline silicon as a raw material, and in order to melt and store the polycrystalline silicon, use A bowl-shaped vitreous silica crucible with an open top. Silica vitreous crucibles are made from natural silica powder and synthetic silica powder. [0003] This kind of vitreous silica crucible is generally composed of multiple layers with different properties. For example, the inner peripheral surface is composed of a transparent vitreous silica layer (hereinafter referred to as "transparent layer") containing less air bu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/10C03B20/00
CPCC30B15/10Y10T117/1032C03B20/00C30B29/06
Inventor 须藤俊明北原贤铃木光一山崎真介
Owner SUMCO CORP
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