Heat and mass transfer device with rotational flow boards in process of producing polycrystalline silicon

Abstract

The invention discloses a heat and mass transfer device with rotational flow boards in the process of producing polycrystalline silicon. The heat and mass transfer device comprises a tower barrel, a condenser, rotational flow defogging boards and a plurality of rotational flow devices, wherein each rotational flow device comprises the rotational flow board, a special-shaped connecting pipe, a round overflowing pipe and an annular liquid collecting tank. The rotational flow boards provide a good air-liquid opportunity; and high-temperature mixed air is in contact with condensed liquid fully and completely, so that the condensing effect is greatly improved. The heat and mass transfer device disclosed by the invention is washed by a pipeline directly and has no nozzle device, so that the problem on easy blockage of metal silicon powders on a nozzle is solved; and according to the device provided by the invention, the rotational flow boards additionally arranged at the tower top are used as the defogging boards, therefore the defogging effect is achieved, the air stream goes up, passes through the rotational flow boards and then rotate, and fog drops are thrown to the pipe wall by a centrifugal force and are separated, so that better heat and mass transfer effect is realized, and the condensing efficiency is further improved.

Description

technical field [0001] The invention relates to a heat and mass transfer device for treating high-temperature mixed gas generated by trichlorosilane in polysilicon production and polysilicon tail gas. Background technique [0002] Since the beginning of the 20th century, with the rapid development of science and technology and the rapid expansion of the world's population, mankind's demand for energy is increasing, and there is an urgent need for new sustainable energy such as solar energy, wind energy, nuclear energy, and geothermal energy. Among many new energy sources such as wind energy, solar energy, water energy, biomass energy, geothermal energy, ocean energy and nuclear energy, solar energy is the renewable energy with no pollution and the most abundant reserves. Compared with other aspects, the utilization of solar energy is more and more widely paid attention to. [0003] The nuclear power safety issues caused by the nuclear power plant leakage accident in Japan h...

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Problems solved by technology

[0013] The purpose of the present invention is to provide a heat and mass transfer device with a swirl plate in the polysilicon production process for a series of problems existing in the traditional leaching tower. The present invention is used for cooling trichlorosilane, tetrachlorosilane and High-temperature mixed gases such as silicon dioxide, dichlorodihydrosilane, and hydrogen chloride have good condensation effects, and at the same time, it also solves the problem that the nozzle is easily blocked by the metal silicon powder entrained in the high-temperature mixed gas.

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