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Laser interference system for displacement linearity measurement

A technology of laser interference and straightness, applied in the field of laser interference system, can solve the problems of difficult debugging of the interference system, and achieve the effect of simple structure, stable system and convenient use

Inactive Publication Date: 2012-06-20
UNIV OF SHANGHAI FOR SCI & TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims at the problem that the existing straightness measurement interference system is difficult to debug, and proposes a laser interference system for displacement straightness measurement, which has a simple structure and is easy to debug

Method used

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  • Laser interference system for displacement linearity measurement
  • Laser interference system for displacement linearity measurement
  • Laser interference system for displacement linearity measurement

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Embodiment Construction

[0017] figure 1 It is a structural diagram of a laser interference system according to a preferred embodiment of the present invention, including a laser source 1 , an optical interference device 100 , a wedge prism 10 , a light reflection device 11 , and a phase detection device 110 .

[0018] Wherein the optical interference device 100 includes a polarization splitter prism 2, a quarter wave plate 9, and a corner cube 8. The phase detection device includes a polarizer 12 , a photodetector 13 and a phase meter 14 .

[0019] The laser source 1 adopts a dual-frequency laser. On the one hand, the laser source 1 provides a frequency-stabilized incident beam 15 to the polarization beam splitter 2. The beam contains two components with different frequencies and linear polarization directions that are orthogonal to each other. A stable sinusoidal electrical reference signal 68 is generated, the frequency of which is equal to the frequency difference of the two components of the las...

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Abstract

The invention relates to a laser interference system for displacement linearity measurement, which comprises a laser source, a wedge angle prism moving with an object to be measured, a light reflection device arranged on one side of the wedge angle prism, a light interference device arranged between the other end of the wedge angle prism and the laser source, and a phase detecting device, wherein the laser source produces an incidence light beam with stable frequency, the incidence light beam passes the wedge angle prism for two times in the effect of the light interference device, and is correspondingly reflected for two times by the wedge angle prism and the light reflection device, and is finally inputted into the phase detecting device; and the linearity of the object to be measured is determined by a variable quantity of a phase difference. The laser interference system for the displacement linearity measurement has the advantages of simple structure and high measurement accuracy, and can be widely applied to geometric sense precision measurement of fields such as war industry, aerospace and numerical control machines and the like, and establishment of a measurement reference.

Description

technical field [0001] The invention relates to a precision measurement technology, in particular to a laser interference system for displacement straightness measurement. Background technique [0002] In high-tech fields such as military industry, aerospace, and CNC machine tools, precision reference measurement and precise measurement of geometric quantities play a very important role, especially the measurement technology of straightness, which has attracted more and more attention. [0003] US Patent No. 4,787,747 to Sommargren et al., which is incorporated herein by reference in its entirety, discloses an interferometric system for measuring straightness of travel of mechanical devices. In the interference system disclosed in the US patent, two partial retroreflectors are used to respectively reflect two linearly polarized light beams. Since the distance between the optical axes of the mirrors in the horizontal direction needs to be set equal to the distance between th...

Claims

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Application Information

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IPC IPC(8): G01B11/26
Inventor 侯文玫乐燕芬句爱松
Owner UNIV OF SHANGHAI FOR SCI & TECH
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